Symposium – Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II
Research Article
Correlations Between Structural Characteristics and Process Conditions of HSQ Based Porous Low-k Thin Films
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- 17 March 2011, L7.11.1
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A Study on the Properties of Different IMP Ta, Ta(N) and Multi-Layer Ta/Ta(N) as Diffusion Barriers for Cu Metallization
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- 17 March 2011, L5.6.1
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A New X-Ray Scattering Method for Determining Pore-Size Distribution in Low-k Thin Films
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- 17 March 2011, L12.10.1
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Low Dielectric Constant Functionalized Silica Gels
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- 17 March 2011, L7.17.1
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Properties of Sputtered Bilayer WNx/W Diffusion Barriers between Si and Cu
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- 17 March 2011, L4.6.1
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Comparative Study on Wafer-Level and Package-Level Electromigration Reliability for Sub-Quarter Micron Logic Devices
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- 17 March 2011, L9.3.1
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Investigation of N2 Plasma Effects on the Density Profile of Hydrogen Silsesquioxane Thin Films
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- 17 March 2011, L7.10.1
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Deposition and Characterization of PECVD SiOC Films by Using Bistrimethylsilylmethane (BTMSM) Precursor
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- 17 March 2011, L7.12.1
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Highly (111) Oriented Al Thin Films by Ion-Plating Method Using Discharge Plasma
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- 17 March 2011, L8.6.1
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Electromigration Characterization of Damascene Copper Interconnects: Comparison Between CVD Copper and ECD Copper.
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- 17 March 2011, L6.9.1
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Analysis of Electromigration Extrusion Failure Mode in Damascene Copper Interconnects
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- 17 March 2011, L9.1.1
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Thin-Film Aerogel Porosity and Stiffness Characterized by Surface Acoustic Wave Spectroscopy
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- 17 March 2011, L12.7.1
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Electrical Characterization of Copper Penetration Effects in the Gate Oxide of MOS Devices
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- 17 March 2011, L8.12.1
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Chemical Vapor Deposition (CVD) of Tungsten Nitride for Copper Diffusion Barriers
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- 17 March 2011, L8.10.1
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Comparative Analysis of the Nucleation and Growth of Copper on Different Low-k Polymers
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- 17 March 2011, L8.1.1
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The Effect of Initial Void Configuration on the Morphological Evolution Under the Action of Normalized Electron Wind Forces
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- 17 March 2011, L9.2.1
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Engineered Low Resistivity Titanium-Tantalum Nitride Films by Atomic Layer Deposition
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- 17 March 2011, L5.3.1
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