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The Effect of Initial Void Configuration on the Morphological Evolution Under the Action of Normalized Electron Wind Forces

Published online by Cambridge University Press:  17 March 2011

Ersin Emre Oren  and
Tarik Omer Ogurtani
Ersin Emre Oren
Affiliation:
Department of Metallurgical and Materials Engineering Middle EastTechnical University, 06531, Ankara, Turkey
Tarik Omer Ogurtani
Affiliation:
Department of Metallurgical and Materials Engineering Middle EastTechnical University, 06531, Ankara, Turkey
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Abstract

In these studies a comprehensive picture of void shape evolution dynamics and its strong dependence on the initial configuration has been thoroughly investigated by utilizing hypocycloid algebra to generate four different shapes of main interest. Our mathematical model on the isotropic diffusion and mass accumulation on void surfaces, under the action of applied electrostatic potential and capillary effects, follows a novel irreversible but discrete thermodynamic formalism of interphases and surfaces.

As a result during the intragranual motion, in addition to the crescent-like slit formation, very rich and also unusual void morphological variations such as fragmentations into the daughter voids or inner island generation have been observed under the severe (normalized) electron wind intensities or very long exposure times. In these numerical experiments, the Euler's method of finite differences with an automatic time step self-adjustment has been utilized in combination with a rather powerful and fast indirect boundary element method (IBEM) for the solution of the Laplace equation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 714: Symposium – Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II , 2001 , L9.2.1
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

1 Sanchez, J. E., Kraft, O., and Arzt, E., Appl. Phys. Lett., 61, 3121, (1992).Google Scholar
2 Wagner, C., Diffusion in Solids, Liquids and Gases, (Academic Press, New York), p. 69, (1960).Google Scholar
3 Kirkaldy, J. S., and Young, D. J. Diffusion in Condensed State, (The Institute of Metals, London), p. 48, (1985)Google Scholar
4 Ogurtani, T. O., Irreversible Thermodynamics of Curved Surfaces and Interphases (unpublished).Google Scholar
5 Herring, C., J. Apply. Phys., 21, ”437, (1950).Google Scholar
6 Liu, C. Y., Lee, S., and Chuang, T. J., Mat. Sci. Eng. B, 86, 101–108, (2001).Google Scholar
7 Rice, J. R., Chuang, T. J., J. Am. Ceram. Soc., 64 (1), 46–53, (1981).Google Scholar
8 Ogurtani, T. O., and Oren, E. E., J. Appl. Phys., 90 (3), 1564–1572, (2001).Google Scholar
9 Beer, G., and Watson, J. O., Introduction to Finite and Boundary Element Methods for Engineers (John Wiley, New York), p. 151, (1992).Google Scholar
10 Gungor, M. R., and Maroudas, D., J. Appl. Phys. 85, 2233–2246 (1999)Google Scholar
11 Oren, E. E., Ms. thesis, Middle East Technical University, (2000).Google Scholar
12 Oren, E. E., METU/D-VoidSim (Dynamic Void Simulator) is accessible on the World Wide Web at http://www.csl.mete.metu.edu.tr/.Google Scholar
13 Oren, E. E., and Ogurtani, T. O., Mat. Res. Soc. Symp. Proc., 695, L5.5.1-L5.5.7, (2002).Google Scholar