Symposium R – Modedling and Simulation of Thin-Film Processing
Research Article
Mechanisms of Grain Growth in Bubble-Fence-Delineated Films
-
- Published online by Cambridge University Press:
- 15 February 2011, 143
-
- Article
- Export citation
Elastic Analysis of Twinning in Misfitting Thin Films
-
- Published online by Cambridge University Press:
- 15 February 2011, 149
-
- Article
- Export citation
Void Formation in Thin Semiconducting Film Under Ion Implantation
-
- Published online by Cambridge University Press:
- 15 February 2011, 155
-
- Article
- Export citation
Evaluation of Anisotropic Film Structure of Amorphous Alloy by Computer Simulation
-
- Published online by Cambridge University Press:
- 15 February 2011, 161
-
- Article
- Export citation
Simulation of the Nucleation and Growth of Si Grains Inside Au Thin Films
-
- Published online by Cambridge University Press:
- 15 February 2011, 167
-
- Article
- Export citation
Simulation Studies of TiN PVD and CVD Thin Films for Contact/Via Liners
-
- Published online by Cambridge University Press:
- 15 February 2011, 173
-
- Article
- Export citation
Molecular Dynamics Simulation of Mechanical Deformation of Ultra-Thin Metal and Ceramic Films
-
- Published online by Cambridge University Press:
- 15 February 2011, 181
-
- Article
- Export citation
A Model for Estimating the Stress Induced During Oxidation of Sharp Silicon Structures
-
- Published online by Cambridge University Press:
- 15 February 2011, 191
-
- Article
- Export citation
Modeling of Aspect Ratio Dependent Etching in an Inductively Coupled Plasma
-
- Published online by Cambridge University Press:
- 15 February 2011, 197
-
- Article
- Export citation
Monte Carlo Simulation of Dislocation-Nucleated Etching of Silicon {111} Surfaces
-
- Published online by Cambridge University Press:
- 15 February 2011, 209
-
- Article
- Export citation
Modeling and Computer Simulation of the Thermal Field Induced by Ion Beam Irradiation of Bilayers
-
- Published online by Cambridge University Press:
- 15 February 2011, 215
-
- Article
- Export citation
Comparison of Damage Accumulation Models for Boron Implantation in Silicon
-
- Published online by Cambridge University Press:
- 15 February 2011, 221
-
- Article
- Export citation
Dynamic Simulation of Ultra-Shallow Implantation Profiles in Single-Crystalline Silicon
-
- Published online by Cambridge University Press:
- 15 February 2011, 227
-
- Article
- Export citation
Theoretical Investigation of Implanted Dopant Diffusion From a Silicide Layer to the Silicon Wafer for Ultra Shallow P-N Junction Formation
-
- Published online by Cambridge University Press:
- 15 February 2011, 233
-
- Article
- Export citation
Computational Simulation of Photoluminescence and Reflectivity Spectra of a Strained Layer Superlattice
-
- Published online by Cambridge University Press:
- 15 February 2011, 241
-
- Article
- Export citation
Characterization of Quantum Heterostructures. A Simulation Method Combining the Evaluation of Lattice and Electrons Configuration and TEM Imaging.
-
- Published online by Cambridge University Press:
- 15 February 2011, 257
-
- Article
- Export citation
The Effects of Collimator Life Time on the Ti and Tin Film Growth Rates and Conformalities in Sputter Deposition Processes: Experiments and Simulations
-
- Published online by Cambridge University Press:
- 15 February 2011, 263
-
- Article
- Export citation
Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on Ft-Ir In-Line Sensor
-
- Published online by Cambridge University Press:
- 15 February 2011, 269
-
- Article
- Export citation
Optimization of Process Parameter and Temperature Uniformity on Wafers for Rapid Thermal Processing
-
- Published online by Cambridge University Press:
- 15 February 2011, 275
-
- Article
- Export citation
Transient and Spatial Radiative Properties of Patterned Wafers during Rapid Thermal Processing
-
- Published online by Cambridge University Press:
- 15 February 2011, 287
-
- Article
- Export citation