Low-density plasma is generated in a cylindrical DC magnetron
discharge tube. Distribution of the magnetic field strengths in the radial
and axial directions is drawn. Langmuir probe data are obtained at the
edge of the cathode fall region of Ar gas discharge at pressure range from
0.5 to 4.0 torr.
In the presence of the magnetic field, values of the electron
temperature Te are smaller than that without magnetic field. While plasma
density Ne increases by a factor of two than that without magnetic field.
The electron density increases with magnetic field due to electron
magnetic confinement.
Also, the radial distribution of Te and Ne in the cathode fall region
of the glow discharge is discussed. The magnetic field drift velocity plays
an important role to make the radial distribution of Te and Ne slightly
changed.