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Feasibility of X-ray fluorescence imaging in a SEM using pinhole relay optics

Published online by Cambridge University Press:  15 May 2001

D. Erre ,
H. Jibaoui ,
S. Rondot  and
D. Mouze
D. Erre*
Affiliation:
Dynamique des Transferts aux Interfaces (DTI) (CNRS UMR 6107), Faculté des Sciences, BP 1039, 51687 Reims Cedex 2, France
H. Jibaoui
Affiliation:
Dynamique des Transferts aux Interfaces (DTI) (CNRS UMR 6107), Faculté des Sciences, BP 1039, 51687 Reims Cedex 2, France
S. Rondot
Affiliation:
Dynamique des Transferts aux Interfaces (DTI) (CNRS UMR 6107), Faculté des Sciences, BP 1039, 51687 Reims Cedex 2, France
D. Mouze
Affiliation:
Dynamique des Transferts aux Interfaces (DTI) (CNRS UMR 6107), Faculté des Sciences, BP 1039, 51687 Reims Cedex 2, France
*
[email protected][email protected]
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Abstract

The feasibility of imaging by X-ray fluorescence in a SEM has been tested on a simple laboratory set-up. It has been demonstrated that images generated by the fluorescent X-rays can be directly obtained with the use of simple pinhole relay optics and an incident X-ray beam created in a SEM. These images were acquired with a charge coupled device (CCD) camera coupled to a phosphor screen by a fibre-optic faceplate. This technique provides chemical and topographical images with a spatial resolution in the object plane of a few micrometres. This “global” imaging has the advantage that the acquisition time is only a few minutes for a sample surface of a few mm2.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 14 , Issue 2 , May 2001 , pp. 143 - 146
Copyright
© EDP Sciences, 2001

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