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Realization and thermal characterization of thin-film optothermal microsensor

Published online by Cambridge University Press:  15 May 2001

H. Gualous ,
H. Louahlia-Gualous  and
S. Bocus
H. Gualous*
Affiliation:
LEES-IGE, 2 avenue Jean Moulin, 90000 Belfort, France
H. Louahlia-Gualous
Affiliation:
CREST-IGE, 2 avenue Jean Moulin, 90000 Belfort, France
S. Bocus
Affiliation:
LEES-IGE, 2 avenue Jean Moulin, 90000 Belfort, France
*
[email protected]
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Abstract

The aim of this investigation is to study thin-film thermoelectric linear arrays for high spatial temperature measurements and to analyze power laser energy profile. The sensitive area consists of a planar of 16 individual thin-film Au-Pd thermocouple junctions with 8 μm × 8 μm of surface area. This sensor allows 16 temperature measurements per 288 μm. It is processed by means of standard integrated circuit techniques. Thermal simulation of heat conduction in gold and palladium layers has been carried out. The sensor thermoelectric response has been characterized in transient regime and steady state. The time constant of thermocouple response is of the order of 140 μs. A linear relationship between the thermoelectric voltage and the incident power laser has been put in evidence. Using the linear array, a Gaussian profile of the incident laser beam is obtained.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 14 , Issue 2 , May 2001 , pp. 147 - 152
Copyright
© EDP Sciences, 2001

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