Substituted β-diketonate complexes of barium have limited volatility even at reduced pressures. The addition of nitrogen Lewis bases to the CVD carrier gas allows barium β-diketonates, even those with no reported volatility, to be transported in the vapor phase at temperatures as low as 70°C (atmospheric pressure) with no decomposition. No increase in volatility is observed, however, for barium carboxylate complexes.

A new deposition technique for PbTiO3 films utilizing chemical beams of metalorganic sources in an ultrahigh vacuum chamber is demonstrated. Ozone is introduced to provide a source of active oxygen. The role of active oxygen in controlling the surface chemical reactions is discussed. Fine grained, single phase PbTiO3 films have been deposited on MgO (100) and SiO2/Si substrates at substrate temperatures as low as 350°C. Films were characterized by XRD, SEM, and TEM. The results suggest that the chemical beam deposition technique provides another method for the fabrication and integration of ferroelectric thin films with silicon (or GaAs) devices.

Ferroelectric thin films, which are Pb(Mgl/3Nb2/3)03 (PMN) and Pb(Mgl/3Nb2/3)03 - PbTiO3 (PMN-PT) in the perovskite phase, were obtained by the sol-gel method with metal alkoxides. The films had highly preferred orientation on substrates whose interplanar spacings are close to that for the perovskite structures in PMN and PMN-PT. Epitaxial growth process in PMN film was investigated.

The utilization of recently discovered aluminum-oxygen-carbon backbone polymers in the preparation of various phases of A12O3 is presented. The structure of the polymers has been examined by ss 27AI NMR, TGA, MS, SEM, XRD, and EDAX. The solid pyrolysis products of these polymers have been characterized by ss 27AI NMR, XRD, SEM, and EDAX. The volatile products of pyrolysis have been studied by trapping, TGA and MS.

Diamond (100) substrates have been halogenated under ultrahigh vacuum conditions using atomic beams of chlorine and fluorine. X-ray photoelectron spectra of the resulting samples indicate that saturation levels of less than a monolayer occur for both species. The fluoride adlayer is stable up to 700 K and slowly desorbs at temperatures above this temperature. In contrast, the chlorine adlayer starts to desorb above 223 K, the lowest temperature sampled.