Hostname: page-component-586b7cd67f-t7czq Total loading time: 0 Render date: 2024-11-25T17:42:06.660Z Has data issue: false hasContentIssue false
  • English
  • Français

Halogenation of Diamond (100) Using Atomic Beams

Published online by Cambridge University Press:  25 February 2011

Andrew Freedman  and
Charter D. Stinespring
Andrew Freedman
Affiliation:
Center for Chemical and Environmental Physics Aerodyne Research, Inc., 45 Manning Road, Billerica, MA 01821
Charter D. Stinespring
Affiliation:
Center for Chemical and Environmental Physics Aerodyne Research, Inc., 45 Manning Road, Billerica, MA 01821
Get access

Abstract

Diamond (100) substrates have been halogenated under ultrahigh vacuum conditions using atomic beams of chlorine and fluorine. X-ray photoelectron spectra of the resulting samples indicate that saturation levels of less than a monolayer occur for both species. The fluoride adlayer is stable up to 700 K and slowly desorbs at temperatures above this temperature. In contrast, the chlorine adlayer starts to desorb above 223 K, the lowest temperature sampled.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 204: Symposium E – Chemical Perspectives of Microelectronic Materials II , 1990 , 571
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. “Diamond and Diamond-Like Films,” edited by Purdes, A.J., Myerson, B.S., Moustakas, T.D., Spear, K.E., Ravi, K.V., and Yoder, M., Proc. Vol. 89–12, The Electrochemical Society (Pennington, NJ) 1989.Google Scholar
2. Robinson, A.L., Science, 234, 1074 (1986); P.K. Bachmann and R. Messier, Chem. Eng. News, May 15, 1989, pgs. 24-39.Google Scholar
3. Yarbrough, W.A. and Messier, R., Science 247, 688 (1990).Google Scholar
4. Rudder, R.A., Posthill, J.B., and Markunas, R.J., Electronics Letters 25, 1220 (1989).Google Scholar
5. Patterson, D.E., Bai, B.J., Chu, J., Hauge, R.H., and Margrave, J.L., “Halogen Assisted CVD of Diamond”, presented at 2nd International Conference on New Diamond Science and Technology, September 1990, Washington, DC.Google Scholar
6. Patterson, D.L., Hauge, R.E., and Hargrave, J.L., “Fluorinated Diamond Films, Slabs, and Grit,” Mat. Res. Soc. Symp. Proc. 140, 351 (1989).Google Scholar
7. Gardos, M.N. and Ravi, K.V., “Tribological Behavior of CVD Diamond Films,” in Diamond and Diamond-Like Films, Proc. Vol. 89–12, The Electrochemical Society (Pennington, NJ) (1989).Google Scholar
8. Stinespring, C.D., Freedman, A., and Kolb, C.E., J. Vac. Sci. Technol. A4, 1946 (1986).Google Scholar
9. Morar, J.F., Himpsel, F.J., Hollinger, G., Jordan, J.L., Hughes, G., and HcFeely, F.R., Phys. Rev. B33, 1340 (1986).Google Scholar
10. Pate, B.B., Oshima, M., Silberman, J.A., Rossi, G., Lindau, I., and Spicer, W.E., J. Vac. Sci. Technol. A2, 957 (1984).Google Scholar
11. Hsu, D.S.Y. and Turner, N.H., “Fluorination of Diamond (111) Single Crystal Surfaces by XeF2 ,” 4th SDIO/IST Diamond Technology Initiative Symposium, Crystal City, VA, July 1989, Unpublished.Google Scholar
12. Freedman, A. and Stinespring, C.D., Appl. Phys. Lett. 57, 1194 (1990).Google Scholar
13. Hamza, A., Kubiak, G.D., and Stulen, R.H., Sur. Sci. to be published.Google Scholar