We present the workflow of the design, realization and testing of deformable mirrors suitable for high power diode pumped solid-state lasers. It starts with the study of the aberration to be corrected, and then it continues with the design of the actuators position and characteristic. In this paper, we present and compare three deformable mirrors realized for multi-J level laser facilities. We show that with the same design concept it is possible to realize deformable mirrors for other types of lasers. As an example, we report the realization of a deformable mirror for femtosecond lasers and for a CW $\text{CO}_{2}$ laser.

The deformable mirror with the size of $410~\text{mm}\times 468~\text{mm}$ controlled by the bimorph piezoceramic plates and multilayer piezoceramic stacks was developed. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer and a Shack–Hartmann wavefront sensor has shown that it was possible to improve the flatness of the surface down to a residual roughness of $0.033~{\rm\mu}\text{m}$ (RMS). The possibility of correction of the aberrations in high-power lasers was numerically demonstrated.

SPICA is a cooled, single large-mirror space-telescope, which is under discussion as an succsesor of the ASTRO-F mission. One of the most ambitious challenges of the SPICA mission is the direct observations of exoplanets with a coronagraph instrument. We report cryogenic infrared optics to realize high quality wavefronts for the SPICA coronagraph.

The SPICA satellite will be launched by an H-IIA rocket to Sun-Earth L2 Halo orbit early in the 2010s. The SPICA telescope is a Ritchey-Chretien optics with 3.5m diameter primary mirror, and cooled down to 4.5 K in orbit by radiation cooling and mechanical cryo-coolers. Main working wavelengths are 5–200 micron. Advantages of the SPICA coronagraph are the infrared wavelenths where the contrast between planets and central stars are smaller than the optical wavelengths, and that the cooled space telescope consists of monolithic mirrors.

Development of light-weight cooled telescope is one of the most important tasks to realize SPICA. At the present, sintered SiC and carbon fiber reinforced SiC (C/SiC) composite are candidate materials for the mirrors, truss, and optical bench. For these materials, estimations and improvements of basic property and surface roughness in cryogenic temperatures have been carried out. Deformation of trial product mirrors by cooling is also examined.

We are developing cryogenic deformable mirrors (DMs) because wave front accuracy of the SPICA telescope is 0.35 micron RMS, which is not enough for our coronagraphic instrument. For MEMS (Micro Electro Mechanical System) DM and some others, measurements of thermal deformation by cooling, electrical response, and heat generation are undergoing. Developments of a tip-tilt system for cryogenic usage started to cancel vibration caused by the cryo-coolers and other components and to realize a diffraction limit resolution. The first result of our binary mask coronagraph experiment is also shown.