Piezoelectric materials have a strong interaction between their mechanical and electrical properties that translates into innovative components and circuits architectures. This work describes an original method using the electromechanical properties of the aluminum nitride (AlN) piezoelectric material to characterize its vertical extension when an electric field is applied. The novel techniques based on measurements of a planar parallel plate AlN capacitor without and with bias employing an impedance analyzer. The parallel plate capacitor theory and piezoelectric material analysis are used to calculate the vertical displacement of the AlN film.

This work presents a methodology for designing microwave acoustic filters, based on two-port bulk acoustic wave resonators (also known as stacked crystal filters), with either Butterworth or Chebyshev response. The presented methodology makes it possible to design this type of filter without any optimization work, and, moreover, for its closed-form expressions design can be obtained. As a validation example, we address the design of a pair of filters for UMTS cellular phone handsets. The different simulations carried out show the good agreement between the transmission response of the designed filters and the theoretical response.

Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, materials and properties for thin-film bulk acoustic wave resonators are discussed on some selected issues: the piezoelectric coefficients and acoustic losses of AlN, the relation of the first one with microstructural parameters, the inclusion of parasitic elements, and the merits of and problems with ferroelectric materials.

A class of micromachined acoustic filters is presented in which the number of individual resonant structures is reduced to 1 (monolithic filter). This resonant structure is comprised of a stack of thin-film piezoelectric-on-silicon. Symmetric and anti-symmetric resonance modes (dual modes) of the silicon structure are piezoelectrically excited and coupled to realize a 2-pole narrowband filter. High-order lateral bulk acoustic resonance modes of a rectangular plate are utilized to design dispersed-frequency UHF filters fabricated on a single substrate. Thickness mode filters are also realized at GHz frequencies using a new interdigitated electrode design. Additionally, it is shown that the filter bandwidth can be controlled by changing the dimensions of the resonant structure and the electrode pattern. Narrowband lateral mode filters with filter Q’s larger than 300 at ~440 MHz and thickness mode filters with filter Q’s in the range of 150–900 at ~3.1 GHz are demonstrated.

This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.

This paper investigates the effect of spontaneous polarization of magnetron-sputtered aluminum nitride on the electrical properties and reliability of Radio Frequency – Micro-Electro-Mechanical Systems capacitive switches. The assessment is performed with the aid of application of thermally stimulated polarization currents in metal-insulator-metal capacitors and temperature dependence of device capacitance. The study reveals the presence of a surface charge, which is smaller than that expected from material spontaneous polarization, but definitely is responsible for the low degradation rate under certain bias polarization life tests.

At present, millimeter wave fast tunable components are required for telecommunication systems, car collision prevention radar, etc. The only mechanical way of control inserts practically no loss in the frequency agile system. That is why micro-electromechanical systems devices are being studied intensively. In an overview, an alternative way – piezo-electromechanical tuning of microwave components – is reported.

In this paper, a miniaturized bandpass filter for ultra-wide-band applications is proposed. It is based on the embedding of high-pass structures in a low-pass filter. A semi-lumped technology combining surface-mounted capacitors and transmission lines has been used. The filter design rules have been carried out. Furthermore, two filters having a 3-dB fractional bandwidth of 142 and 150%, centered at 0.77 and 1 GHz, respectively, have been realized for a proof of concept. Measured characteristics, in good agreement with simulations, show attractive properties of return loss (|S11| <−18 dB), insertion loss (<0.3 dB), and a maximum group delay and group delay variation of 2 and 1.3 ns, respectively. A distributed filter based on the same low-pass/high-pass approach has been also realized and measured for comparison. The size reduction reaches 85% for the semi-lumped filter, and its selectivity is improved with a shape factor of 1.3:1 instead of 1.5:1. The semi-lumped filter's drawback is related to a smaller rejection bandwidth compared to the distributed one. To improve the high-frequency stopband, an original technique for spurious responses suppression based on capacitively loaded stubs has been proposed. Even if the performances do not reach that obtained for the distributed approach, with this technique spurious responses are pushed until eight times the center frequency. A sensitivity study vs. critical parameters has also been carried out, showing the robustness of the design.

Two geometrically derived stability parameters, µ′ (or µ) and ν′(or ν), are used to analyze the stability of a two-port network. The magnitudes of both µ′ (or µ) and ν′ (or ν) parameters determine geometrical relations between the stability circle and the unit Smith chart in the ΓS (or ΓL) plane. |µ′| (or |µ|) is defined as the minimum distance from the stability circle to the origin of the unit Smith chart in the ΓS (or ΓL) plane, while |ν′|(or |ν|) is defined as the maximum distance. Moreover, the signs of ν′ (or ν) and µ′ (or µ) parameters determine which region of the stability circle is stable (inside or outside) and whether the stable region includes the origin of the Smith chart, respectively. There are totally 12 situations between the stability circle and the unit Smith chart in the ΓS (or ΓL) plane by using µ′ (or µ) and ν′ (or ν) parameters. This paper classifies 12 situations in the ΓS plane and also presents the corresponding practical two-port networks.

Ultra wideband (UWB) wireless systems are highly susceptible to interference from other services. To reduce the effect of interference from co-existing sources such as the WLAN standard IEEE 802.11a on UWB Communication, the construction of a modified template waveform using multi-carrier sinusoids is proposed in Ohno and Ikegami (2003), Ohno et al. (2004), Ohno and Ikegami (2006), and Lakshmanan and Nikookar (2007). However, the work in Ohno and Ikegami (2003), Ohno et al. (2004), Ohno and Ikegami (2006), and Lakshmanan and Nikookar (2007) considers a free space propagation channel model with no treatment of the frequency dependence of the path loss. In this paper, we broaden the study by taking into consideration a frequency-dependent path loss environment. The novelty of the work is in the investigation of the effect of frequency dependency of the path loss on the performance of interference mitigation schemes.

To achieve a high IIP2 level on a mixer, static calibration techniques have been developed. Most of them are based on an intentional introduction of a calibrated mismatch in the structure of the mixer. They are performed at production stage. It is also possible to automate them but their activation is strongly limited in portable devices because of system restrictions. Furthermore, IIP2 is sensitive to system variations, thereby degrading the calibration operation. The challenge is so to make the calibration system dynamic, i.e. performing an online calibration. This paper presents a perturbance-based algorithm as part of an automatic calibration system to track the optimum IIP2 level. Measurements validate the algorithm behavior and indicate the feasibility of using it in a complete calibration system for a future on-chip implementation.