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Lithographical bending control method for a piezoelectric actuator

Published online by Cambridge University Press:  06 March 2009

Tamio Ikehashi ,
Etsuji Ogawa ,
Hiroaki Yamazaki  and
Tatsuya Ohguro
Tamio Ikehashi*
Affiliation:
Toshiba Corporation, Semiconductor Company, Center for Semiconductor R&D Yokohama, Japan.
Etsuji Ogawa
Affiliation:
Toshiba Corporation, Semiconductor Company, Center for Semiconductor R&D Yokohama, Japan.
Hiroaki Yamazaki
Affiliation:
Toshiba Corporation, Semiconductor Company, Center for Semiconductor R&D Yokohama, Japan.
Tatsuya Ohguro
Affiliation:
Toshiba Corporation, Semiconductor Company, Center for Semiconductor R&D Yokohama, Japan.
*
Corresponding author: T. Ikehashi E-mail: [email protected]
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Abstract

This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.

Keywords

MEMSPiezoelectric actuatorPZTBendingLBC
Type
Original Article
Information
International Journal of Microwave and Wireless Technologies , Volume 1 , Issue 1 , February 2009 , pp. 37 - 42
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2009

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References

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