Thermal scanning electron microscopy is a new temperature mapping technique based on thermal diffuse scattering in electron backscatter diffraction in a scanning electron microscope. It provides both nano-scale resolution and far-field non-contact temperature mapping capabilities no other methods can adequately combine. While a calculated spatial resolution of less than 100 nm has already been realized using 20 keV electrons, lower energy incident electrons should enable still higher spatial resolution (even down to 10 nm). In this paper, the feasibility of this approach is examined.

A fundamental understanding of the processes that occur during early stages of corrosion is traditionally limited by the dearth of techniques that probe the liquid-solid interface with both high spatial resolution and microstructural detail such as grain size and orientation. Here, we demonstrate that with a microfluidic liquid flow cell holder, we can track the progress of corrosion in situ in Al thin films with transmission electron microscopy (TEM). To mitigate the loss of resolution caused by imaging through liquid, we developed a method in which the liquid is temporarily de-wetted from the entire windowed area by switching the liquid stream from pure water to a mixture of ethanol and water. In the de-wetted region, we then collected images of the film microstructure with high spatial resolution over regular intervals while maintaining a low electron flux over the imaged area to minimize beam-induced effects. For as-deposited films, we find that the corrosion progresses in a fractal manner, consistent with reported behavior for films studied in water with low iron and chloride concentrations. For films that were subjected to rapid thermal annealing, we observe a higher density of pitting events, which we attribute to defects created by thermal stress in the oxide film. Furthermore, we observe that the pits can form at multiple locations in a single grain and are not confined to grain boundaries.

In-situ transmission electron microscopy (TEM) method is powerful in a way that it can directly correlate the atomic-scale structure with physical and chemical properties. We will report on the construction and applications of the homemade in-situ TEM electrical and optical holders. Electrical transport of carbon nanotubes and photoconducting response on bending of individual ZnO nanowires have been studied inside TEM. Oxygen vacancy electromigration and its induced resistance switching effect have been probed in CeO2 films.