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Microscale friction investigation of polysilicon surface using scanning force microscopy

Published online by Cambridge University Press:  15 July 1998

C. Flueraru ,
C. Cobianu ,
D. Dascalu  and
M. Flueraru
C. Flueraru*
Affiliation:
Institute of Microtechnology, PO Box 38-160, Bucharest 72225, Romania
C. Cobianu
Affiliation:
Institute of Microtechnology, PO Box 38-160, Bucharest 72225, Romania
D. Dascalu
Affiliation:
Institute of Microtechnology, PO Box 38-160, Bucharest 72225, Romania
M. Flueraru
Affiliation:
Department for Organic Chemistry, University of Bucharest, Bld. Carol 13, Bucharest, Romania
*
[email protected]
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Abstract

Microscale phenomena between the surface of chemically vapour deposited silicon films and a silicon nitride tip was investigated using Scanning Force Microscopy. An analysis of friction forces for different scan directions is presented. For different applied forces, the friction forces were measured and consequently the friction coefficient was calculated. We found that the average friction force linearly increases with the applied force and is reversible when unloading. Connection between the surface roughness and the friction coefficient was experimentally demonstrated.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 3 , Issue 1 , July 1998 , pp. 29 - 33
Copyright
© EDP Sciences, 1998

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