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The waveguide method for measuring parameters of the surface layers

Published online by Cambridge University Press:  16 July 2012

S.S. Danilenko  and
A.N. Osovitskii
S.S. Danilenko*
Affiliation:
Department of Radiophysics, People’s Friendship University of Russia, 6 Miklukho-Maklaya str., 117198 Moscow, Russia
A.N. Osovitskii
Affiliation:
Department of Radiophysics, People’s Friendship University of Russia, 6 Miklukho-Maklaya str., 117198 Moscow, Russia
*
ae-mail: [email protected]
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Abstract

A new method has been applied for determining the mean square deviation of surface roughness and the imaginary part of permittivity of the material near-surface region. The method is based on the scattering and absorption of light in waveguide systems of integrated optics. It has high sensitivity and ease of implementation. The advantages of the proposed method are confirmed experimentally.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 59 , Issue 1 , July 2012 , 11301
Copyright
© EDP Sciences, 2012

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