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Monte Carlo simulation of electron swarm parameters in O2

Published online by Cambridge University Press:  14 February 2007

A. Settaouti  and
L. Settaouti
A. Settaouti*
Affiliation:
Electrotechnic Department, University of Sciences and Technology, PO Box 1505 El-M'naouar, 31000 Oran, Algeria
L. Settaouti
Affiliation:
Electrotechnic Department, University of Sciences and Technology, PO Box 1505 El-M'naouar, 31000 Oran, Algeria
*
[email protected]
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Abstract

Oxygen plasmas have found numerous applications in plasma processing, such as reactive sputtering, dry etching of polymers, oxidation, and resist removal of semiconductors. Swarm and transport coefficients are essential for better understanding and modelling of these gas discharge processes. The electron swarms in a gas under the influence of an electric field can be simulated with the help of a Monte Carlo method. The swarm parameters evaluated are compared with experimental results.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 37 , Issue 3 , March 2007 , pp. 335 - 341
Copyright
© EDP Sciences, 2007

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