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Gold Langmuir-Blodgett deposited nanoparticles for non-volatile memories

Published online by Cambridge University Press:  01 February 2011

S. Kolliopoulou ,
D. Tsoukalas ,
P. Dimitrakis ,
P. Normand ,
S. Paul ,
C. Pearson ,
A. Molloy  and
M. C. Petty
S. Kolliopoulou
Affiliation:
Institute of Microelectronics, NCSR Demokritos, 153 10 Aghia Paraskevi, Greece
D. Tsoukalas
Affiliation:
National Technical University of Athens, 15780 Zografou, Greece
P. Dimitrakis
Affiliation:
Institute of Microelectronics, NCSR Demokritos, 153 10 Aghia Paraskevi, Greece
P. Normand
Affiliation:
Institute of Microelectronics, NCSR Demokritos, 153 10 Aghia Paraskevi, Greece
S. Paul
Affiliation:
Centre for Molecular and Nanoscale Electronics, University of Durham, Durham DH1 3LE, UK
C. Pearson
Affiliation:
Centre for Molecular and Nanoscale Electronics, University of Durham, Durham DH1 3LE, UK
A. Molloy
Affiliation:
Centre for Molecular and Nanoscale Electronics, University of Durham, Durham DH1 3LE, UK
M. C. Petty
Affiliation:
Centre for Molecular and Nanoscale Electronics, University of Durham, Durham DH1 3LE, UK
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Abstract

In this work, we demonstrate a MISFET memory device that incorporates a monolayer of Langmuir-Blodgett (LB) deposited gold nanoparticles as floating gate charge storage elements. The FET device is fabricated on a SOI substrate using conventional silicon processing. The nanoparticle layer is separated from the channel area of the FET with a 5 nm thermal SiO2 layer and is isolated from Al gate contact with a LB-deposited organic insulator layer. The memory effect is tested using voltage pulses on the gate of the device and monitored through drain current measurements. The nanocrystals can be charged either from the channel through the thermal oxide layer by applying pulses smaller than 5 V or from the gate through the organic insulator for higher voltage depending on the pulse duration.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 830: Symposium D – Materials and Processes for Nonvolatile Memories , 2004 , D6.7
Copyright
Copyright © Materials Research Society 2005

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References

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