Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by
Crossref.
Chen, S. Y.
Shen, Z. X.
Li, K.
See, A. K.
and
Chan, L. H.
2000.
Synthesis and characterization of pure C40 TiSi2.
Applied Physics Letters,
Vol. 77,
Issue. 26,
p.
4395.
Chen, S. Y.
Shen, Z. X.
See, A. K.
and
Chan, L. H.
2001.
Enhancement Effect of C40 TiSi[sub 2] on the C54 Phase Formation.
Journal of The Electrochemical Society,
Vol. 148,
Issue. 12,
p.
G734.
Chen, S. Y.
Shen, Z. X.
Xu, S. Y.
See, A. K.
Chan, L. H.
and
Li, W. S.
2001.
Direct Formation of C54 Phase on the Basis of C40 TiSi2 and Its Applications in Deep Sub-Micron Technology.
MRS Proceedings,
Vol. 670,
Issue. ,
Chen, S. Y.
Shen, Z. X.
Xu, S. Y.
Ong, C. K.
See, A. K.
and
Chan, L. H.
2002.
Excimer Laser-Induced Ti Silicidation to Eliminate the Fine-Line Effect for Integrated Circuit Device Fabrication.
Journal of The Electrochemical Society,
Vol. 149,
Issue. 11,
p.
G609.
Zhao, Jin
Lu, Jiong-Ping
Xu, Yu-Qing
Kuan, Yu-Ji R
and
Tsung, Lancy
2003.
Characterization of reactions at titanium/nickel silicide interface using X-ray photoelectron spectroscopy and transmission electron microscopy.
Applied Surface Science,
Vol. 211,
Issue. 1-4,
p.
367.
Saha, A.R.
Chattopadhyay, S.
Dalapati, G.K.
Bose, C.
and
Maiti, C.K.
2005.
Effect of annealing on interface state density of Ni-silicided/Si1−xGex Schottky diode.
Materials Science in Semiconductor Processing,
Vol. 8,
Issue. 1-3,
p.
249.
Tan, S. C.
Liu, L.
Zeng, Y. P.
See, A.
and
Shen, Z. X.
2005.
The Effect of Film Thickness on the C40 TiSi[sub 2] to C54 TiSi[sub 2] Transition Temperature.
Journal of The Electrochemical Society,
Vol. 152,
Issue. 10,
p.
G754.
Chow, F. L.
Lee, P. S.
Pey, K. L.
Tang, L. J.
Tung, C. H.
Wang, X. C.
and
Lim, G. C.
2006.
Pulsed laser-induced silicidation on TiN-capped Co∕Si bilayers.
Journal of Applied Physics,
Vol. 99,
Issue. 4,
Li, Bei
and
Liu, Jianlin
2009.
CoSi
2
-coated Si nanocrystal memory.
Journal of Applied Physics,
Vol. 105,
Issue. 8,
Esposito, L.
Kerdilès, S.
Gregoire, M.
Benigni, P.
Dabertrand, K.
Mattei, J.-G.
and
Mangelinck, D.
2020.
Impact of nanosecond laser energy density on the C40-TiSi2 formation and C54-TiSi2 transformation temperature.
Journal of Applied Physics,
Vol. 128,
Issue. 8,
Guelladress, Réda
Kerdilès, Sébastien
Dartois, Mélanie
Sabbione, Chiara
Gregoire, Magali
and
Mangelinck, Dominique
2024.
C54-TiSi2 formation using nanosecond laser annealing of A-Si/Ti/A-Si stacks.
Thin Solid Films,
Vol. 798,
Issue. ,
p.
140386.