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Electrical and Optical Properties of Sol-Gel Processed Pb(Zr,Ti)o3 Films

Published online by Cambridge University Press:  25 February 2011

S. D. Ramamurthi ,
S. L. Swartz ,
K. R. Marken ,
J. R. Busch  and
V. E. Wood Battelle
S. D. Ramamurthi
Affiliation:
505 King Avenue, Columbus, OH 43201
S. L. Swartz
Affiliation:
505 King Avenue, Columbus, OH 43201
K. R. Marken
Affiliation:
505 King Avenue, Columbus, OH 43201
J. R. Busch
Affiliation:
505 King Avenue, Columbus, OH 43201
V. E. Wood Battelle
Affiliation:
505 King Avenue, Columbus, OH 43201
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Abstract

Lead-zirconate-titanate, Pb(Zr0.53Ti0.47)O3, films were produced by the sol-gel method from alkoxide and acetate precursors in a 2-methoxyethanol solvent system. The PZT films were deposited on platinized silicon and single-crystal SrTiO3 substrates for electrical and optical characterization, respectively. The processing parameters, especially excess PbO content and annealing conditions, were shown to have a significant effects on the properties of PZT films. Epitaxial PZT films deposited on SrTiO3 waveguided over 10 mm distances with propagation losses as low as 5.9 dB/cm at 783 nm and a linear electro-optic effect was also demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 271: Symposium N – Better Ceramics Through Chemistry V , 1992 , 351
Copyright
Copyright © Materials Research Society 1992

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References

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