Hostname: page-component-586b7cd67f-r5fsc Total loading time: 0 Render date: 2024-11-23T09:24:25.768Z Has data issue: false hasContentIssue false
  • English
  • Français

Diffusivity of Si in the 3C-SiC Buffer Layer on Si(100) by X-ray Photoelectron Spectroscopy

Published online by Cambridge University Press:  01 February 2011

Wei-Yu Chen ,
Jian-You Lin ,
Jenn-Chang Hwang  and
Chih-Fang Huang
Wei-Yu Chen
Affiliation:
[email protected], National Tsing Hua University, Materials Science and Engineering, Hsinchu, Taiwan, Province of China
Jian-You Lin
Affiliation:
[email protected], National Tsing Hua University, Materials Science and Engineering, Hsinchu, Taiwan, Taiwan, Province of China
Jenn-Chang Hwang
Affiliation:
[email protected], National Tsing Hua University, Materials Science and Engineering, Hsinchu, Taiwan, Taiwan, Province of China
Chih-Fang Huang
Affiliation:
[email protected], National Tsing Hua University, Department of Electrical Engineering, Hsinchu, Taiwan, Taiwan, Province of China
Get access

Abstract

A void free 3C-SiC film grown on Si(100) can be achieved by low pressure chemical vapor deposition using the modified four-step method. The diffusion step plays an important role to enhance the quality of the 3C-SiC buffer layer on Si(100). X-ray photoelectron spectroscopy was used to characterize the bonding characteristics of the 3C-SiC buffer layer of about 10 nm thick. The Si-C bonds are partially formed on the as-carburized Si(100) before the diffusion step. The ratio of C-C to Si-C bonds on the as-carburized Si(100) is about 7:3, which can be lowered to about 1:9 after the diffusion step at 1350 oC for 5 min or at 1300 oC for 7 min. According to XPS data and Fick's second law, the diffusivity of Si across the 3C-SiC interlayer are determined to be 2.2×10-16 cm2/s and 3.13×10-16 cm2/s at 1300°C and 1350°C, respectively. The derived activation energy is 1.6 eV for the diffusion of Si atoms in the 3C-SiC buffer layer.

Keywords

x-ray photoelectron spectroscopy (XPS)chemical vapor deposition (CVD) (deposition)diffusion
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1246: Symposium B – Silicon Carbide 2010-Materials, Processing and Devices , 2010 , 1246-B07-10
Copyright
Copyright © Materials Research Society 2010

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Zettetling, C. M., Process Technology for Silicon Carbide Device, (Institution of Electrical Engineers, London, 2002) p. 4,Google Scholar
2 Casady, J. B. and Johnson, R. W., Solid-State Electronics 39, 1409 (1996)Google Scholar
3 Nishino, S., Powell, J. A., Hill, H. A., Appl. Phys. Lett. 42, 460–462 (1983)Google Scholar
4 Nagasawa, H., Yagi, K., and Kawahara, T., J. Crystal Growth, 237–239, 1244–1249 (2002)Google Scholar
5 Liaw, P., and Davis, R. F., J. Electrochem. Soc. 132, 642–648 (1985)Google Scholar
6 Steckl, A. J., and Li, J. P., IEEE Trans. Electron. Devices 39, 64–74 (1992)Google Scholar
7 Chen, W. Y., Chen, C. C., Hwang, J., and Huang, C. F., Crystal Growth & Design 9, 2616–2619 (2009)Google Scholar
8 Chen, W. Y., Wang, W. L., Liu, J. M., Chen, C. C. Hwang, J., Huang, C. F., and Chang, Li, J. Electrochem. Soc. 157, H337–H380 (2010)Google Scholar
9 Nishino, S., Hazuki, Y., Matsunami, H., and Tanaka, T., J. Electrochem. Soc. 127, 2674–2680 (1980)Google Scholar
10 Li, J. P., and Steckl, A. J., J. Electrochem. Soc. 142, 634–641 (1995)Google Scholar
11 Ferro, G., Monteil, Y., Vincent, H., Cauwet, F., Bouix, J., Durupt, P., Olivier, J., and Bisaro, R., Thin Solid Film 278, 22–27 (1996)Google Scholar
12 Cimalla, V., Wohner, Th., and Pezoldt, J., Mater. Sci. Forum 338–342, 321–324 (2000)Google Scholar