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Chemical-Mechanical Polishing of Optical Glasses

Published online by Cambridge University Press:  31 January 2011

Elisabeth Becker ,
Andreas Prange  and
Reinhard Conradt
Elisabeth Becker
Affiliation:
[email protected], RWTH Aachen, Institut für Gesteinshüttenkunde, Aachen, Germany
Andreas Prange
Affiliation:
[email protected], RWTH Aachen, Institut für Gesteinshüttenkunde, Aachen, Germany
Reinhard Conradt
Affiliation:
[email protected], RWTH Aachen, Institut für Gesteinshüttenkunde, Aachen, Germany
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Abstract

This paper presents the Chemical-Mechanical Polishing of optical and fine-optical glasses, which is employed to fulfill the optical requirements for the surfaces of optical lenses. We present the effect of chemical interactions in the polishing process of optical lenses and show how these interactions can be influenced by the additions of certain chemicals. Furthermore, we present a thermodynamic simulation tool, by which these interactions can be modeled. Thus it is possible to understand the chemistry in the suspension and to simulate recent polishing processes in advance, with new additives or with various intrinsic glass ions from different glasses.

Keywords

CMPsimulationslurry
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1157: Symposium E – Science and Technology of Chemical Mechanical Planarization (CMP) , 2009 , 1157-E03-02
Copyright
Copyright © Materials Research Society 2009

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References

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