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Auger Electron Spectroscopy of Metallic Film/Laser-Irradiated Alumina Couples

Published online by Cambridge University Press:  15 February 2011

Jaewon Park ,
Anthony J. Pedraza  and
William R. Allen
Jaewon Park
Affiliation:
Department of Materials Science and Engineering, The University of Tennessee, Knoxville, TN 37996-2200
Anthony J. Pedraza
Affiliation:
Department of Materials Science and Engineering, The University of Tennessee, Knoxville, TN 37996-2200
William R. Allen
Affiliation:
Martin Marietta Energy Systems, P.O. Box 2009, Oak Ridge, TN 37996-8084
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Abstract

Auger Electron Spectroscopy (AES) was employed to study metal/ceramic interfaces. Adhesion pull testing showed that a strong bonding between metallic films and alumina substrates is obtained when alumina is laser-irradiated in an oxygen atmosphere before deposition and, after deposition, the couple is annealed at 300°C for 1 h. On the other hand the gold/alumina bonding is extremely weak when laser-irradiation of the substrate is performed in argon-4% H2. Fresh surfaces were exposed for AES at several distances from the metal/ceramic interface by sputtering the specimens in situ after each analysis. In the region of the interface the sputtering rate was slower than in the film in order to minimize any spurious effect due to ion beam bombardment. AES of a gold/alumina couple prepared in this way reveals that the Auger peaks of gold from the film and oxygen and aluminum from the alumina substrate, when the substrate was irradiated in oxygen atmosphere, shift by ∼ 1.5 eV, 1.6eV, and 1.4eV respectively when the analysis area encompasses the metal/ceramic interface. On the other hand, no shift of the Auger peaks are observed at the interface when the laser-irradiation was performed in argon-4%H2. In the case of copper deposited on alumina laser-irradiated in an oxygen atmosphere, an interfacial compound is formed. This compound is a double oxide of aluminum/copper or two separated oxides, and promotes strong copper/alumina bonding.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 357: Symposium C – Structure and Properties of Interfaces in Ceramics , 1994 , 59
Copyright
Copyright © Materials Research Society 1995

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