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Texture and Related Phenomena of Copper Electrodeposits

Published online by Cambridge University Press:  15 February 2011

D. N. Lee
D. N. Lee*
Affiliation:
Division of Materials Science and Engineering, and Center for Advanced Materials Research, Seoul National University, Seoul 151-742, Korea, snumfc@dosal. snu.ac.kr
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Abstract

The texture of copper electrodeposits changes from the orientation that places the lowest energy crystal facets parallel to the substrate under a condition of low ion concentration adjacent to the deposit, to the orientation that places the higher energy crystal facets parallel to the substrate as the ion concentration adjacent to the deposit increases. The copper electrodeposits have peculiar surface morphologies and microstructures depending on their textures, which in turn may affect their mechanical properties even when they are obtained in similar electrolysis conditions. The electrodeposits undergo recrystallization, when annealed. The recrystallization texture may be different from the original deposit texture. These phenomena have been discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 427: Symposium K – Advanced Metallization for Future ULSI , 1996 , 167
Copyright
Copyright © Materials Research Society 1996

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