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Properties of Metal / Polyphenylquinoxaline Interfaces

Published online by Cambridge University Press:  25 February 2011

L. Bellard ,
J.M. Themlin ,
F. Palmino  and
A. Cros
L. Bellard
Affiliation:
URA CNRS 783, Faculté des Sciences de Luminy Département de Physique, Case 901 13288 Marseille Cedex 9, France
J.M. Themlin
Affiliation:
URA CNRS 783, Faculté des Sciences de Luminy Département de Physique, Case 901 13288 Marseille Cedex 9, France
F. Palmino
Affiliation:
URA CNRS 783, Faculté des Sciences de Luminy Département de Physique, Case 901 13288 Marseille Cedex 9, France
A. Cros
Affiliation:
URA CNRS 783, Faculté des Sciences de Luminy Département de Physique, Case 901 13288 Marseille Cedex 9, France
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Abstract

We have investigated the microscopic properties of copper and chromium layers deposited on polyphenylquinoxaline (PPQ). PPQ is a thermostable polymer used for multichip module applications. The metal is deposited under ultra-high vacuum conditions and analysed in-situ by X-ray photoemission (XPS) and atomic force microscopy (ex situ). Copper does not react significantly with the PPQ and tends to diffuse into the polymer matrix upon annealing. On the contrary, chromium strongly reacts with the polymer surface at room temperature. With increasing metal coverage, chromium grows in a layer-by-layer mode and the reacted interface is progressively burried under the pure metal layer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 337: Symposium B – Advanced Metallization for Devices and Circuits—Science, Technology and Manufacturing III , 1994 , 715
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1 Soane, D. and Martynenko, Z., Polymers in Electronics. (Elsevier, Amsterdam,1989).Google Scholar
2 Seraphin, D.P., Lasky, R. and Li, C.Y., Principles of Electronic Packaging. (Me Graw-Hill, New-York, 1989).Google Scholar
3 See for example : Metallization of Polymers, edited by Sacher, E., Pireaux, JJ. and Kowalcyzk, S.P. (American Chemical Society, Washington D.C., 1990), and references contained therein.Google Scholar
4 Chou, N.J. and Tang, C.H., J. Vac. Sci. Technol. A, 2, 751 (1984).CrossRefGoogle Scholar
5 Hahn, P.O., Rubloff, G.W., Bartha, J.W., Le Goues, F. and Ho, P.S., Mater. Res. Soc. Symp. Proc. 40, 251 (1985).Google Scholar
6 Haight, R., White, R.C., Silverman, B.D. and Ho, P.S., J. Vac. Sci. Technol. A, 6, 2188 (1988).Google Scholar
7 Anderson, S.G., Leu, J., Silverman, B.D. and Ho, P.S., J. Vac. Sci. Technol. A, 11, 2, 368 (1993).Google Scholar
8 Chenite, A. and Selmani, A., Surf. Sci. 301, 197 (1994).Google Scholar
9 Jordan, J.L., Kovac, C.A., Morar, J.F. and Pollak, R.A., Phys. Rev. B, 36, 3, 1369 (1987).Google Scholar
10 Chou, N.J., Dong, D.W., Kim, J. and Liu, A.C., J. Electrochem. Soc. 131, 2335 (1984).Google Scholar
11 Sillion, B. and Verdet, L. in Polyimides and other high temperature polymers, edited by Abadie, M.J.M. and Sillion, B. (Elsevier, 1991), p. 363.Google Scholar
12 Cros, A., Giustiniani, R., Dallaporta, H., Torres, J., Templier, F. and Palleau, J. in Polyimides and other high temperature polymers. edited by Abadie, M.J.M. and Sillion, B. (Elsevier, 1991), p. 421.Google Scholar
13 Cros, A., Dallaporta, H., Lazare, S., Templier, F., Nechstein, J., Palleau, J., Hiraoka, H. and J. Torres in Metallized Plastics 3. edited by Mittal, K.L. (Plenum, 1991) p. 201.Google Scholar
14 Fontaine, M., Layet, J.M., Gregoire, C., Pireaux, J.J. and Cros, A., Appl. Phys. Letters 62, 23, 2938 (1993).Google Scholar
15 Chou, J.T., Zhu, B., Lau, S.S. and Cros, A., Mater. Chem. and Phys. 32, 386 (1992).Google Scholar
16 Pireaux, J.J., Gregoire, C., Giustiniani, R. and Cros, A. in Polymer-Solid Interfaces, edited by Pireaux, J.J., Bertrand, P. and Bredas, J.L. (Institute of Physics Publishing, Bristol, 1992) p. 237.Google Scholar
17 Faupel, F., Polymer-Solid Interfaces, edited by Pireaux, J.J., Bertrand, P. and Bredas, J.L. (Institute of Physics Publishing, Bristol, 1992) p. 171.Google Scholar