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P+ implanted 6H-SiC n+-i-p diodes: evidence for a post-implantation-annealing dependent defect activation

Published online by Cambridge University Press:  17 June 2014

R. Nipoti ,
M. Puzzanghera  and
F. Moscatelli
R. Nipoti
Affiliation:
CNR-IMM, UOS of Bologna, via Gobetti 101, 40129 Bologna, Italy
M. Puzzanghera
Affiliation:
CNR-IMM, UOS of Bologna, via Gobetti 101, 40129 Bologna, Italy
F. Moscatelli
Affiliation:
CNR-IMM, UOS of Bologna, via Gobetti 101, 40129 Bologna, Italy
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Abstract

Two n+-i-p 6H-SiC diode families with P+ ion implanted emitter have been processed with all identical steps except the post implantation annealing: 1300°C/20min without C-cap has been compared with 1950°C/10min with C-cap. The analysis of the temperature dependence of the reverse current at low voltage (-100V) in the temperature range 27-290°C shows the dominance of a periphery current which is due to generation centers with number and activation energy dependent on the post implantation annealing process. The analysis of the temperature dependence of the forward current shows two ideality factor n region, one with n = 1.9/2 at low voltage and the other one with 1 < n < 2 without passing through 1 for increasing voltages. For both the diode families the current with n = 1.9/2 is a periphery current due to recombination centers with a thermal activation energy near the 6H-SiC mid gap. In the forward current region of 1 < n < 2, the two diode families show different ideality factor values which could be attributed to a different post implantation annealing defect activation.

Keywords

ion-implantationannealingdefects
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1693: Symposium DD – Silicon Carbide–Materials, Processing and Devices , 2014 , mrss14-1693-dd04-01
Copyright
Copyright © Materials Research Society 2014 

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References

REFERENCES

Negoro, Y., Katsumoto, K., Kimoto, T., and Matsunami, H., J. Appl. Phys. 96, 224–230 (2004).CrossRefGoogle Scholar
Nipoti, R., Nath, A., Rao, Mulpuri V., Hallén, A., et al. ., Appl. Phys. Express 4, 111301(2011).CrossRefGoogle Scholar
Nath, A., Rao, Mulpuri V. Tian, Y.-L., et al. ., J. Electr. Mater. 41(3 ), 457–465 (2012).Google Scholar
Nipoti, R., Scaburri, R., Hallén, A., and Parisini, A., J. Mater. Res. 28(1), 17–22 (2013).CrossRefGoogle Scholar
Ayedh, H.M., Bobal, V., Nipoti, R., Hallén, A., et al. ., J. Appl. Phys. 115, 012005 (2014).CrossRefGoogle Scholar
Storasta, L., and Tsuchida, H., Appl. Phys. Lett. 90, 062116 (2007).CrossRefGoogle Scholar
Miyazawa, T., and Tsuchida, H., J. Appl. Phys. 113, 083714 (2013).CrossRefGoogle Scholar
Nipoti, R., Benedetto, L. Di, Albonetti, C., et. Al., ECS Transactions, 50(3) 391–397 (2012).CrossRefGoogle Scholar
Sasaki, S., Suda, J., and Kimoto, T., J. Appl. Phys. 111, 103715 (2012)CrossRefGoogle Scholar
Grossner, U., Moscatelli, F., and Nipoti, R., Mater. Sc. Forum, 778–780, 657–660 (2014).CrossRefGoogle Scholar
http://www.srim.org/ Google Scholar
Nipoti, R., et al. ., Electrochemical and Solid-State Letters, 13(12), H432–H435 (2010).CrossRefGoogle Scholar
Sah, C-T., Noyce, R.N., and Shockley, W., Proc. IRE, 45, 1228–1243 (1957).CrossRefGoogle Scholar