Hostname: page-component-cd9895bd7-dzt6s Total loading time: 0 Render date: 2024-12-27T02:25:18.029Z Has data issue: false hasContentIssue false

Investigations on a New Failure Model for Electromigration

Published online by Cambridge University Press:  15 February 2011

J. Kitchin
Affiliation:
Digital Equipment Corporation, 77 Reed Rd., Hudson MA 01749
J. R. Lloyd
Affiliation:
Digital Equipment Corporation, 77 Reed Rd., Hudson MA 01749
Get access

Extract

A new statistical model for electromigration failure in fine-line thin film conductors is developed in [1] by extending [2] to incorporate the statistics of microstructure and concomitant variations in the activation energy for grain boundary diffusion. The resulting distribution of time t to failure is well-approximated by

where N is the number of line segments that are potential independent failure elements, 1μ and σ are, respectively, the mean and standard deviation of an assumed normal distribution of activation energy in grain boundaries, γ is a scaling constant, T is in degrees Kelvin, j is the current density in the line, p1 is the fraction of line segments for which exactly one grain boundary occurs between two blocking boundaries, and Φ is the standard normal cumulative distribution function. (Note: .)

Type
Research Article
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Lloyd, J. R. and Kitchin, J., Journal of Applied Physics, 69 (4), 2117, (1991)Google Scholar
[2] Shatzkes, M. and Lloyd, J.R., Journal of Applied Physics, 59, 3890, (1986)Google Scholar
[3] Murray, L. P., Rathbun, L. C. and Wolf, E. D., Applied Physics Letters, 53, 1414, (1988)Google Scholar
[4] Balluffi, R. W., in Grain Boundary Structure and Kinetics, American Society for Metals, Metals Park, OH, (1980)Google Scholar
[5] Lloyd, J. R., Journal of Applied Physics, 69 (11), 7601, (1991)Google Scholar
[6] Lloyd, J. R., To Appear MRS Symposium, (1991)Google Scholar