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Investigations on a New Failure Model for Electromigration

Published online by Cambridge University Press:  15 February 2011

J. Kitchin
Affiliation:
Digital Equipment Corporation, 77 Reed Rd., Hudson MA 01749
J. R. Lloyd
Affiliation:
Digital Equipment Corporation, 77 Reed Rd., Hudson MA 01749
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Extract

A new statistical model for electromigration failure in fine-line thin film conductors is developed in [1] by extending [2] to incorporate the statistics of microstructure and concomitant variations in the activation energy for grain boundary diffusion. The resulting distribution of time t to failure is well-approximated by

where N is the number of line segments that are potential independent failure elements, 1μ and σ are, respectively, the mean and standard deviation of an assumed normal distribution of activation energy in grain boundaries, γ is a scaling constant, T is in degrees Kelvin, j is the current density in the line, p1 is the fraction of line segments for which exactly one grain boundary occurs between two blocking boundaries, and Φ is the standard normal cumulative distribution function. (Note: .)

Type
Research Article
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

[1] Lloyd, J. R. and Kitchin, J., Journal of Applied Physics, 69 (4), 2117, (1991)Google Scholar
[2] Shatzkes, M. and Lloyd, J.R., Journal of Applied Physics, 59, 3890, (1986)Google Scholar
[3] Murray, L. P., Rathbun, L. C. and Wolf, E. D., Applied Physics Letters, 53, 1414, (1988)Google Scholar
[4] Balluffi, R. W., in Grain Boundary Structure and Kinetics, American Society for Metals, Metals Park, OH, (1980)Google Scholar
[5] Lloyd, J. R., Journal of Applied Physics, 69 (11), 7601, (1991)Google Scholar
[6] Lloyd, J. R., To Appear MRS Symposium, (1991)Google Scholar