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Investigation of the off-current in amorphous silicon thin film transistors for SiO2 and SiNx. gate insulators

Published online by Cambridge University Press:  10 February 2011

Jeong Hyun Kim ,
Woong Sik Choi ,
Chan Hee Hong  and
Hoe Sup Soh
Jeong Hyun Kim
Affiliation:
LCD R&D center, LG Electronics Inc., Anyang, Kyungkido, 430-080, Korea
Woong Sik Choi
Affiliation:
LCD R&D center, LG Electronics Inc., Anyang, Kyungkido, 430-080, Korea
Chan Hee Hong
Affiliation:
LCD R&D center, LG Electronics Inc., Anyang, Kyungkido, 430-080, Korea
Hoe Sup Soh
Affiliation:
LCD R&D center, LG Electronics Inc., Anyang, Kyungkido, 430-080, Korea
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Abstract

The off current behavior of hydrogenated amorphous silicon (a-Si:H) thin film transistors (TFTs) with an atmospheric pressure chemical vapor deposition (APCVD) silicon dioxide (SiO2) gate insulator were investigated at negative gate voltages. The a-Si:H TFT with SiO2 gate insulator has small off currents and large activation energy (Ea) of the off current compared to the a-Si:H TFT with SiNx gate insulator. The holes induced in the channel by negative gate voltage seem to be trapped in the defect states near the a-Si:H/SiO2 interface. The interface state density in the lower half of the band gap of a-Si:H/SiO2 appears to be much higher than that for a-Si:H/SiNx.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 424: Symposium H – Flat Panel Display Materials II , 1996 , 85
Copyright
Copyright © Materials Research Society 1997

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