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Growth of Perovskites with Crystalline Interfaces on Si(100)

Published online by Cambridge University Press:  01 February 2011

G. J. Norga ,
A. Guiller ,
C. Marchiori ,
J. P. Locquet ,
H. Siegwart ,
D. Halley ,
C. Rossel ,
D. Caimi ,
J. W. Seo  and
J. Fompeyrine
G. J. Norga*
Affiliation:
IBM Research, Zurich Research Laboratory, 8803 Rueschlikon, Switzerland
A. Guiller
Affiliation:
IBM Research, Zurich Research Laboratory, 8803 Rueschlikon, Switzerland
C. Marchiori
Affiliation:
IBM Research, Zurich Research Laboratory, 8803 Rueschlikon, Switzerland Laboratorio MDM - INFM, Via C. Olivetti 2, 20041 Agrate Brianza (MI), Italy
J. P. Locquet
Affiliation:
IBM Research, Zurich Research Laboratory, 8803 Rueschlikon, Switzerland
H. Siegwart
Affiliation:
IBM Research, Zurich Research Laboratory, 8803 Rueschlikon, Switzerland
D. Halley
Affiliation:
IBM Research, Zurich Research Laboratory, 8803 Rueschlikon, Switzerland
C. Rossel
Affiliation:
IBM Research, Zurich Research Laboratory, 8803 Rueschlikon, Switzerland
D. Caimi
Affiliation:
IBM Research, Zurich Research Laboratory, 8803 Rueschlikon, Switzerland
J. W. Seo
Affiliation:
IPMC, Ecole Polytechnique Fédérale de Lausanne, 1015 Ecublens, Switzerland
J. Fompeyrine
Affiliation:
IBM Research, Zurich Research Laboratory, 8803 Rueschlikon, Switzerland
*
‡ E-mail: [email protected].
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Abstract

The main challenges involved in the growth of an epitaxial oxide film with a crystalline interface to silicon are reviewed: (1) structural matching of the oxide and semiconductor lattices; (2) thermodynamic energy stabilization at the semiconductor–oxide interface, and (3) kinetic control over oxygen motion throughout the deposition process. We report on how this approach can be used to grow epitaxial perovskites of high structural quality from the (Ba, Sr)(Zr,Ti)O3 family with crystalline interfaces on Si (100) by molecular-beam epitaxy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 786: Symposium E – Fundamentals of Novel Oxide/Semiconductor Interfaces , 2003 , E7.3
Copyright
Copyright © Materials Research Society 2004

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References

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