Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-25T16:55:02.251Z Has data issue: false hasContentIssue false
  • English
  • Français

The “Computer-Aided Epitaxy” Si:MBE-Control System

Published online by Cambridge University Press:  22 February 2011

R. A. Kubiak ,
S. M. Newstead ,
A. R. Powell ,
D. K. Bowen ,
R. D. Barlow ,
M. G. Dowsett ,
T. E. Whall  and
E. H. C. Parker
R. A. Kubiak
Affiliation:
Department of Physics, University of Warwick, Coventry CV4 7AL, England
S. M. Newstead
Affiliation:
Department of Physics, University of Warwick, Coventry CV4 7AL, England
A. R. Powell
Affiliation:
Department of Physics, University of Warwick, Coventry CV4 7AL, England
D. K. Bowen
Affiliation:
Department of Physics, University of Warwick, Coventry CV4 7AL, England
R. D. Barlow
Affiliation:
Department of Physics, University of Warwick, Coventry CV4 7AL, England
M. G. Dowsett
Affiliation:
Department of Physics, University of Warwick, Coventry CV4 7AL, England
T. E. Whall
Affiliation:
Department of Physics, University of Warwick, Coventry CV4 7AL, England
E. H. C. Parker
Affiliation:
Department of Physics, University of Warwick, Coventry CV4 7AL, England
Get access

Abstract

A dedicated, grower-friendly MBE computer control system is described, and its performance in demonstrated in growth of high resolution doped SiGe structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 220: Symposium B – Silicon Molecular Beam Epitaxy , 1991 , 55
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Kasper, E. and Parker, E. H. C. (editors) 3rd International Symposium on Silicon MBE Thin Solid Films 183 (1989)Google Scholar
2. Kasper, E. and Bean, J. C. (editors) Silicon-Molecular Beam Epitaxy. CRC Press (1988)Google Scholar
3. Precision Epitaxy Ltd. Coventry. UKGoogle Scholar
4. Kubiak, R. A., Newstead, S. M., Powell, A. R., Parker, E. H. C., Whall, T. E., Naylor, T. and Bowen, D. K.. J. Vac. Sci. Technol., in print Aug/Sept issue (1991)Google Scholar
5. Powell, Adrian, Kubiak, Richard, Parker, Evan, Bowen, Keith and Polcarova, Milena. MRS Proc Fall (1990).Google Scholar
6. Powell, A. R., Kubiak, R. A. A., Newstead, S. M., Parry, C., Mattey, N. L., Smith, D. W., Brighten, J. C., Emeleus, C. J., Naylor, T., Basaran, E., Whall, T. E., Dowsett, M. G., Barlow, R. D., Parker, E. H. C. and Bowen, D. K., J. Crystal Growth, 111 (1991)Google Scholar
7. Powell, A. R., Mattey, N. L., Kubiak, R. A. A., Parker, E. H. C. and Bowen, D. K.., Semicond. Sci. Technol. 6 227 (1991)Google Scholar
8. Mattey, N. L., Phillips, P. J., Kubiak, R. A., Parker, E. H. C. and Whall, T. E.. Weak localization and electron-electron effects in B-5 layers. In preparationGoogle Scholar
9. Powell, A. R., Kubiak, R. A. A., Whall, T. E. and Bowen, D. K.., J. Phys. D: Appl. Phys. 23 1745 (1990)Google Scholar
10. Common User Access. Advanced Interface Design Guide. IBM. (1989)Google Scholar
11. Adams, D.. The hitch-hikers guide to the galaxy. (Pan Books London 1979)Google Scholar