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Co/HfO2 core shell nanocrystal memory

Published online by Cambridge University Press:  01 February 2011

Huimei Zhou ,
James Anthony Dorman ,
Ya-Chuan Perng ,
Stephanie Gachot ,
Jian Huang ,
Yuanbing Mao ,
Jane Chang  and
Jianlin Liu
Huimei Zhou
Affiliation:
[email protected], UCR, Department of Electrical Engineering, Riverside, California, United States
James Anthony Dorman
Affiliation:
[email protected]
Ya-Chuan Perng
Affiliation:
[email protected], UCLA, Department of Chemical Engineering, Los Angeles, California, United States
Stephanie Gachot
Affiliation:
[email protected], UCLA, Department of Chemical Engineering, Los Angeles, California, United States
Jian Huang
Affiliation:
[email protected], UCR, Department of Electrical Engineering, Riverside, California, United States
Yuanbing Mao
Affiliation:
[email protected], UCLA, Department of Chemical Engineering, Los Angeles, California, United States
Jane Chang
Affiliation:
[email protected], UCLA, Department of Chemical Engineering, Los Angeles, California, United States
Jianlin Liu
Affiliation:
[email protected]
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Abstract

Metal/high-k dielectric core shell nanocrystal memory capacitor was demonstrated. This kind of MOS memory shows good performance in charge storage capacity, programming and erasing speed. By using a self-assembled Block Co-Polymer, Co/HfO2 core shell nanocrystals were well arrayed and showed uniform dot size and inter distance between dots. Compared with traditional metal nanocrystal fabrication process with E-Beam Evaporation followed by RTA (Rapid Thermal Annealing), core shell nanocrystal memory prepared by Block Co-Polymer produces a wide memory window of 8.4V at the ±12 V voltage sweep. Co/HfO2 core shell nanocrystals prepared by low-temperature Block Co-polymer process ensure high reliability of the devices.

Keywords

Simemorynanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1250: Symposium G – Materials and Physics for Nonvolatile Memories II , 2010 , 1250-G01-09
Copyright
Copyright © Materials Research Society 2010

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