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Cobalt and Titanium Metallization of SiGeC for Shallow Contacts

Published online by Cambridge University Press:  15 February 2011

A. E Bair ,
T. L. Alford ,
Z. Atzmon ,
S. D. Marcus ,
D. C. Doller ,
R. Morton ,
S. S. Lau  and
J. W. Mayer
A. E Bair
Affiliation:
Department of Chemical, Bio, Materials Engineering
T. L. Alford
Affiliation:
Department of Chemical, Bio, Materials Engineering
Z. Atzmon
Affiliation:
Department of Chemical, Bio, Materials Engineering
S. D. Marcus
Affiliation:
AST Elektronik, USA, 7755 S. Research Drive, Tempe, AZ 85284
D. C. Doller
Affiliation:
AST Elektronik, USA, 7755 S. Research Drive, Tempe, AZ 85284
R. Morton
Affiliation:
Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla, CA 92093
S. S. Lau
Affiliation:
Department of Electrical and Computer Engineering, University of California at San Diego, La Jolla, CA 92093
J. W. Mayer
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287
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Abstract

Shallow contact metallization of SiGeC was studied in anticipation of this alloys use in low power applications. It has been shown that in the solid state reaction of Co on (100) Si, that Co is the moving species with proper annealing conditions. This prevents the formation of Kirkendal voiding in certain device structures. This work studies the Co and Ti metallization of SiGeC. A bilayer of 44 nm of Co on 7 nm of Ti, were electron beam evaporated onto epitaxially grown Si0.77Ge0.21C0.02. The samples were rapid thermal processed at 600 and 900 °C for up to two minutes in a nitrogen ambient. The analysis techniques used were Rutherford backscattering spectrometry which included the used of the 4.27 MeV 12C(α,α) 12C resonance reaction, glancing angle x-ray diffraction, During annealing at all temperatures, Co diffused through the Ti layer and formed CoSi. This phase was confirmed by x-ray diffraction. The Co displaced the Ti to the surface. At 600 °C, Ge diffused to the surface layer, while at 900 °C it was rejected back into the original SiGeC. The sample annealed at 600 °C was subsequently annealed at 900 °C. The Ge in the surface layer was rejected from the surface layer, diffused across the CoSi and back into the SiGeC.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 427: Symposium K – Advanced Metallization for Future ULSI , 1996 , 529
Copyright
Copyright © Materials Research Society 1996

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