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Characterization of Polysilicon films using atomic force microscopy

Published online by Cambridge University Press:  10 February 2011

Francis P. Fehlner ,
Chad B. Moore  and
J. Greg Couillard
Francis P. Fehlner
Affiliation:
Corning Incorporated, Science and Technology Division, Corning, NY, 14831
Chad B. Moore
Affiliation:
Corning Incorporated, Science and Technology Division, Corning, NY, 14831
J. Greg Couillard
Affiliation:
Cornell University, MS&E, Bard Hall, Ithaca, NY, 14853
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Abstract

A simplified technique for characterizing crystallites in polysilicon films has been demonstrated based on use of the atomic force microscope (AFM). The crystallization of films deposited by two different techniques was examined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 424: Symposium H – Flat Panel Display Materials II , 1996 , 261
Copyright
Copyright © Materials Research Society 1997

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References

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