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0.1μm Technology and Beol

Published online by Cambridge University Press:  15 February 2011

Tak H. Ning
Tak H. Ning*
Affiliation:
IBM Thomas J. Watson Research Center Yorktown Heights, New York 10598, [email protected]
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Abstract

It is clear that, at the device level, CMOS is scaleable to 0.1 μm and beyond, provided that the power supply voltage and the device physical dimensions are reduced in some coordinated manner. Contacting these devices and connecting them into circuits, and wiring the circuits at the chip level will become ever more challenging. Furthermore, the integration level of 0.1-μm technology is such that the chip will be the system or at least the core of the system. Thus, the BEOL will not be just for interconnecting the circuits on the chip, but provide the interconnect functions that are presently on the package and/or the board. To this end, copper and low-ε inter-level dielectric, on-chip decoupling capacitor, as well as wire-level hierarchy, will be needed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 427: Symposium K – Advanced Metallization for Future ULSI , 1996 , 17
Copyright
Copyright © Materials Research Society 1996

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