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Tuning the physical properties of amorphous In–Zn–Sn–O thin films using combinatorial sputtering

Published online by Cambridge University Press:  05 December 2016

P.F. Ndione ,
A. Zakutayev Open the ORCID record for A. Zakutayev [Opens in a new window] ,
M. Kumar ,
C.E. Packard Open the ORCID record for C.E. Packard [Opens in a new window] ,
J.J. Berry ,
J.D. Perkins  and
D.S. Ginley
P.F. Ndione*
Affiliation:
National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, CO 80401, USA
A. Zakutayev
Affiliation:
National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, CO 80401, USA
M. Kumar
Affiliation:
Colorado School of Mines, 1500 Illinois Street, Golden, CO 80401, USA
C.E. Packard
Affiliation:
National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, CO 80401, USA Colorado School of Mines, 1500 Illinois Street, Golden, CO 80401, USA
J.J. Berry
Affiliation:
National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, CO 80401, USA
J.D. Perkins
Affiliation:
National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, CO 80401, USA
D.S. Ginley
Affiliation:
National Renewable Energy Laboratory, 15013 Denver West Parkway, Golden, CO 80401, USA
*
Address all correspondence to P.F. Ndione at [email protected]
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Abstract

Transparent conductive oxides and amorphous oxide semiconductors are important materials for many modern technologies. Here, we explore the ternary indium zinc tin oxide (IZTO) using combinatorial synthesis and spatially resolved characterization. The electrical conductivity, work function, absorption onset, mechanical hardness, and elastic modulus of the optically transparent (>85%) amorphous IZTO thin films were found to be in the range of 10–2415 S/cm, 4.6–5.3 eV, 3.20–3.34 eV, 9.0–10.8 GPa, and 111–132 GPa, respectively, depending on the cation composition and the deposition conditions. This study enables control of IZTO performance over a broad range of cation compositions.

Type
Functional Oxides Research Letters
Information
MRS Communications , Volume 6 , Issue 4 , December 2016 , pp. 360 - 366
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Copyright
Copyright © Materials Research Society 2016 

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