Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-30T10:41:15.154Z Has data issue: false hasContentIssue false
  • English
  • Français

The effect of substrate roughness on the properties of RF sputtered AZO thin film

Published online by Cambridge University Press:  27 May 2019

Kairi Hamada ,
Takaya Ogawa ,
Hideyuki Okumura  and
Keiichi N. Ishihara
Kairi Hamada
Affiliation:
Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan
Takaya Ogawa
Affiliation:
Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan
Hideyuki Okumura
Affiliation:
Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan
Keiichi N. Ishihara*
Affiliation:
Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan
*
Address all correspondence to Keiichi N. Ishihara at [email protected]
Get access

Abstract

Aluminum-doped zinc oxide (AZO) is one of the most promising transparent conductive oxide materials for a front electrode in solar cells. In this work, we roughened substrate surface and sputtered AZO films, where the effect of roughness on various AZO properties was investigated. The haze values were largely enhanced, retaining other important properties such as conductivity and transparency. The optical band gap exhibits a clear blue shift because of the roughness. The possible cause of this shift may be variation in the Al content due to the different deposition and post-annealing mechanisms of AZO films on the roughened surface.

Type
Research Letters
Information
MRS Communications , Volume 9 , Issue 2 , June 2019 , pp. 697 - 701
Copyright
Copyright © Materials Research Society 2019 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Liu, H., Avrutin, V., Izyumskaya, N., Özgür, Ü., and Morkoç, H.: Transparent conducting oxides for electrode applications in light emitting and absorbing devices. Superlattices Microstruct. 48, 458–484 (2010).Google Scholar
2.Müller, J., Rech, B., Springer, J., and Vanecek, M.: TCO and light trapping in silicon thin film solar cells. Sol. Energy 77, 917–930 (2004).Google Scholar
3.Yan, X., Li, W., Aberle, A.G., and Venkataraj, S.: Textured AZO for thin-film Si solar cells: towards understanding the effect of AZO film thickness on the surface texturing properties. Procedia Eng. 139, 134–139 (2016).Google Scholar
4.Minami, T., Miyata, T., Uozaki, R., Sai, H., and Koida, T: Textured surface structures formed using new techniques on transparent conducting Al-doped zinc oxide films prepared by magnetron sputtering. Thin Solid Films 614, 56–61 (2016).Google Scholar
5.Nomoto, J.I., Nishi, Y., Miyata, T., and Minami, T.: Influence of the kind and content of doped impurities on impurity-doped ZnO transparent electrode applications in thin-film solar cells. Thin Solid Films 534, 426–431 (2013).Google Scholar
6.Koshino, H., Tang, Z., Sato, S., Shimizu, H., Fujii, Y., Hanajiri, T., and Shirai, H.: Rapid thermal annealing of sputter-deposited ZnO: Al films for microcrystalline Si thin-film solar cells. EPJ Photovoltaics 3, 35001 (2012).Google Scholar
7.Hwang, K.H., Nam, S.H., Jung, W.S., Lee, Y.M., Yang, H.S., and Boo, J.H.: Wet chemical etching of Al-doped ZnO film deposited by RF magnetron sputtering method on textured glass substrate for energy application. Bull. Korean Chem. Soc. 36, 850–854 (2015).Google Scholar
8.Hongsingthong, A., Krajangsang, T., Yunaz, I.A., Miyajima, S., and Konagai, M.: Zno films with very high haze value for use as front transparent conductive oxide films in thin-film silicon solar cells. Appl. Phys. Express 3, 051102 (2010).Google Scholar
9.Wu, G.M., Chen, Y.F., and Lu, H.C.: Aluminum-doped zinc oxide thin films prepared by sol-gel and RF magnetron sputtering. Acta Phys. Pol., A 120, 1–149 (2011).Google Scholar
10.Venkataraj, S., Wang, J., Vayalakkara, P., and Aberle, A.G.: Light scattering enhancement by double scattering technique for multijunction thin-film silicon solar cells. IEEE J. Photovolt. 3, 605–612 (2013).Google Scholar
11.Yan, X., Venkataraj, S., and Aberle, A.G.: Wet-chemical surface texturing of sputter-deposited ZnO: Al films as front electrode for thin-film silicon solar cells. Int. J. Photoenergy 2015, 1–10 (2015).Google Scholar
12.Deshmukh, A.V., Patil, S.I., Yusuf, S.M., Rajarajan, A.K., and Lalla, N.P.: Structural, chemical and magnetic investigations of polycrystalline Zn1–xMnxO. J. Magn. Magn. Mater. 322, 536–541 (2010).Google Scholar
Supplementary material: File

Hamada et al. supplementary material

Hamada et al. supplementary material 1

Download Hamada et al. supplementary material(File)
File 2.4 MB