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Review and perspective on ferroelectric HfO2-based thin films for memory applications

Published online by Cambridge University Press:  28 August 2018

Min Hyuk Park ,
Young Hwan Lee ,
Thomas Mikolajick ,
Uwe Schroeder  and
Cheol Seong Hwang
Min Hyuk Park
Affiliation:
NaMLab gGmbH, Noethnitzer Str. 64, 01187 Dresden, Germany School of Materials Science and Engineering, College of Engineering, Pusan National University, 2 Busandaehak-ro 63beon-gil, Geumjeong-gu, Busan 46241, Republic of Korea
Young Hwan Lee
Affiliation:
Department of Materials Science and Engineering, Inter-University Research Center, College of Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
Thomas Mikolajick
Affiliation:
NaMLab gGmbH, Noethnitzer Str. 64, 01187 Dresden, Germany Chair of Nanoelectronic Materials, TU Dresden, Dresden 01069, Germany
Uwe Schroeder*
Affiliation:
NaMLab gGmbH, Noethnitzer Str. 64, 01187 Dresden, Germany
Cheol Seong Hwang*
Affiliation:
Department of Materials Science and Engineering, Inter-University Research Center, College of Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Republic of Korea
*
Address all correspondence to Uwe Schroeder at [email protected], Cheol Seong Hwang at [email protected]
Address all correspondence to Uwe Schroeder at [email protected], Cheol Seong Hwang at [email protected]
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Abstract

The ferroelectricity in fluorite-structure oxides such as hafnia and zirconia has attracted increasing interest since 2011. They have various advantages such as Si-based complementary metal oxide semiconductor-compatibility, matured deposition techniques, a low dielectric constant and the resulting decreased depolarization field, and stronger resistance to hydrogen annealing. However, the wake-up effect, imprint, and insufficient endurance are remaining reliability issues. Therefore, this paper reviews two major aspects: the advantages of fluorite-structure ferroelectrics for memory applications are reviewed from a material's point of view, and the critical issues of wake-up effect and insufficient endurance are examined, and potential solutions are subsequently discussed.

Type
Prospective Articles
Information
MRS Communications , Volume 8 , Issue 3 , September 2018 , pp. 795 - 808
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Copyright © Materials Research Society 2018 

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