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Assessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography

Published online by Cambridge University Press:  12 April 2018

Lizmarie Comenencia Ortiz Open the ORCID record for Lizmarie Comenencia Ortiz [Opens in a new window] ,
David B. Heinz ,
Ian B. Flader ,
Anne L. Alter ,
Dongsuk D. Shin ,
Yunhan Chen  and
Thomas W. Kenny
Lizmarie Comenencia Ortiz*
Affiliation:
Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, CA, 94305, USA
David B. Heinz
Affiliation:
Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, CA, 94305, USA
Ian B. Flader
Affiliation:
Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, CA, 94305, USA
Anne L. Alter
Affiliation:
Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, CA, 94305, USA
Dongsuk D. Shin
Affiliation:
Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, CA, 94305, USA
Yunhan Chen
Affiliation:
Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, CA, 94305, USA
Thomas W. Kenny
Affiliation:
Department of Mechanical Engineering, Stanford University, 440 Escondido Mall, Stanford, CA, 94305, USA
*
Address all correspondence to Lizmarie Comenencia Ortiz at [email protected]
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Abstract

Millions of micro electro mechanical system sensors are fabricated each year using an ultra-clean process that allows for a vacuum-encapsulated cavity. These devices have a multi-layer structure that contains hidden layers with highly doped silicon, which makes common imaging techniques ineffective. Thus, examining device features post-fabrication, and testing, is a significant challenge. Here, we use a combination of micro- and nano-scale x-ray computed tomography to study device features and assess failure mechanisms in such devices without destroying the ultra-clean cavity. This provides a unique opportunity to examine surfaces and trace failure mechanisms to specific steps in the fabrication process.

Type
Research Letters
Information
MRS Communications , Volume 8 , Issue 2 , June 2018 , pp. 275 - 282
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Copyright
Copyright © Materials Research Society 2018 

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