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Packaging Options for MEMS Devices

Published online by Cambridge University Press:  31 January 2011

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Abstract

Microelectromechanical systems (MEMS) devices can be delicate structures sensitive to damage from handling or environmental influences. Their functionality may furthermore depend on sealing out the environment or being in direct contact with it. Stress, thermal load, and contaminants may change their characteristics. Here, packaging technology is challenged to extend from microelectronics toward MEMS and optoelectronic MEMS (MOEMS). Today's approaches rely on modified single-chip packages derived from the microelectronics industry, wafer-level capping to enable the device to be packaged like an integrated circuit, or highly specialized packages designed to complement the function of the MEMS device itself. Selecting the proper packaging method may tip the scale toward a product success or a product failure. Choosing the right technology, therefore, is a crucial part of the product design.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

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References

1.O'Connor, J.P., in Proc. IPACK 2001, The Pacific Rim/ASME Int. Electronic Packaging Tech. Conf. [CD-ROM] (American Society of Mechanical Engineers, New York, 2001).Google Scholar
2.Farell, B. and Lawrence, M.St., in Proc. Electronic Components and Technology Conf. 2002 [CD-ROM] (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2002).Google Scholar
3. MATCH-X Modulare Mikrosysteme Home Page, http://www.Match-X.org (accessed September 2002).Google Scholar
4.Dean, R., Johnson, W., Garrison, H., Schutz, N., Legowik, R., Kranz, M., Bowers, B., and Payne, B., “Strategies for Successfully Integrating MEMS Die onto Laminate,” presented at IMAPS 2002, Denver, 2002.Google Scholar
5.Madou, M.J., Fundamentals of Microfabrication, 2nd ed. (CRC Press, New York, 2002) p. 478.Google Scholar
6. “MEMS Means Business,” OptoMEM (Winter 2002) p. 23.Google Scholar
7.Wiemer, M., Hiller, K., and Gessner, T., in Proc. 5th Int. Symp. on Semiconductor Wafer Bonding: Science, Technology and Applications V (The Electrochemical Society, Pennington, NJ, 1999).Google Scholar
8.Renard, S., “Wafer-Level Surface-Mountable Chip-Size Packaging for MEMS IC,” presented at the 2000 European VLSI Packaging and Microsystem Packaging Techniques and Manufacturing Technologies Workshop, Cork, 2000.CrossRefGoogle Scholar
9. “Danish Researchers Design the World's Smallest Microphone,” Die Welt, April 18, 2002 (in German).Google Scholar
10. Shellcase press release, http:/www.shellcase.com/pages/products.asp (accessed September 2002).Google Scholar
11.Huang, R.-S., Lee, C., and Lin, M.-S., “Micro-machining Technology for Enabling System-in-a-Package,” presented at the 4th IMAPS Advanced Technology Workshop on MEMS Packaging, Denver, 2002.Google Scholar
12.Jung, E., Wiemer, M., and Grosser, V., in Proc. SPIE, Vol. 4755 (SPIE—The International Society for Optical Engineering, Bellingham, WA, 2002).Google Scholar
13.Reichl, H. and Grosser, V., in Proc. IEEE MEMS 2001 [CD-ROM] (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2001).Google Scholar
14. I-STAT Home Page, http://www.i-stat.com (accessed September 2002).Google Scholar
15.Dehé, A., Aigner, R., Bever, T., Oppermann, K.-G., Pettenpaul, E., Schmitt, S., and Timme, H.-J., “Silicon Micromachined Microphone Chip at Siemens,” presented at the 137th Meeting of the Acoustical Society of America and 2nd Convention of the European Acoustics Association, Berlin, 1999.CrossRefGoogle Scholar