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Comparison of Vanadium Oxide Thin Films Prepared Using Femtosecond and Nanosecond Pulsed Laser Deposition

Published online by Cambridge University Press:  03 May 2016

Ying Deng ,
Anthony Pelton  and
R. A. Mayanovic
Ying Deng*
Affiliation:
Department of Physics, Astronomy & Materials Science, Missouri State University, Springfield, MO 65897, U.S.A.
Anthony Pelton
Affiliation:
Department of Physics, Astronomy & Materials Science, Missouri State University, Springfield, MO 65897, U.S.A.
R. A. Mayanovic
Affiliation:
Department of Physics, Astronomy & Materials Science, Missouri State University, Springfield, MO 65897, U.S.A.
*
*(Email: [email protected])
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Abstract

Pulsed laser deposition (PLD) is a technique which utilizes a high energy pulsed laser ablation of targets to deposit thin films on substrates in a vacuum chamber. The high-intensity laser pulses create a plasma plume from the target material which is projected towards the substrate whereupon it condenses to deposit a thin film. Here we investigate the properties of vanadium oxide thin films prepared utilizing two variations of the pulsed laser deposition (PLD) technique: femtosecond PLD and nanosecond PLD. Femtosecond PLD (f-PLD) has a significantly higher peak intensity and shorter duration laser pulse compared to that of the excimer-based nanosecond PLD (n-PLD). Experiments have been conducted on the growth of thin films prepared from V2O5 targets on glass substrates using f-PLD and n-PLD. Characterization using SEM, XRD and Raman spectroscopy shows that the f-PLD films have significantly rougher texture prior to annealing and exhibit with an amorphous nano-crystalline character whereas the thin films grown using n-PLD are much smoother and highly predominantly amorphous. The surface morphology, structural, vibrational, and chemical- and electronic-state elemental properties of the vanadium oxide thin films, both prior to and after annealing to 450 °C, will be discussed.

Keywords

nanostructurethin filmcatalytic
Type
Articles
Information
MRS Advances , Volume 1 , Issue 39: Materials Design , 2016 , pp. 2737 - 2742
Copyright
Copyright © Materials Research Society 2016 

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