Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-20T02:22:48.745Z Has data issue: false hasContentIssue false
  • English
  • Français

Laser sputtering of Zr under Ar and O2 environments explored by quartz crystal microbalance and SEM analysis

Published online by Cambridge University Press:  10 April 2019

Syed Muhammad Abouzar Sarfraz ,
Shazia Bashir  and
Khaliq Mahmood
Syed Muhammad Abouzar Sarfraz
Affiliation:
Centre for Advanced Studies in Physics, Government College University Lahore, Lahore, Pakistan
Shazia Bashir*
Affiliation:
Centre for Advanced Studies in Physics, Government College University Lahore, Lahore, Pakistan
Khaliq Mahmood
Affiliation:
Centre for Advanced Studies in Physics, Government College University Lahore, Lahore, Pakistan
*
Author for correspondence: Shazia Bashir, Centre for Advanced Studies in Physics, Government College University Lahore, Katchery Road, Anarkali, Lahore, Punjab, Pakistan 54000, E-mail: [email protected]
Get access Rights & Permissions [Opens in a new window]

Abstract

The effect of laser fluence and nature of ambient environments on the sputtering yield, surface modifications, crater depth, UV-visible absorption spectra, chemical composition, and micro hardness of Zr has been investigated. Nd: YAG laser (532 nm, 10 Hz, 6 ns) at different fluences varying from 16 to 60.8 Jcm−2 was employed as an irradiation source. All measurements are performed under two ambient environments of Ar and O2 at a constant pressure of 10 Torr. Quartz crystal microbalance has been employed for the measurement of sputtering yield of laser irradiated Zr. It is revealed that sputtering yield increases monotonically with increasing fluence under both environments however, it is higher in Ar as compared to O2 environment. Scanning electron microscope (SEM) has been used to explore the surface morphology. SEM analysis exhibits the formation of cones, ridges, and cracks at the central ablated areas whereas, laser-induced periodic surface structures, periodic ridges and sharp cones are observed at inner boundaries in both environments of Ar and O2. Sharp spikes are observed in both environments, however, their height and distinctness are more pronounced in Ar as compared to O2. Cones are characteristic features in Ar, whereas, cavities and channels are dominant features in O2 environment at outer boundaries. The formation and growth of surface structures are dependent upon laser fluence and ambient gas nature. The depth profilometry has been used to measure the crater depth of irradiated Zr target by using an optical microscope. UV visible spectroscopy and energy-dispersive X-ray analyses reveal the oxide formation in the case of Zr irradiation in O2 environment. The Vicker Micro-hardness tester has been employed to measure the hardness. The higher observed values of sputtering yield, crater depth and hardness of laser ablated Zr in Ar as compared to O2 are well correlated with distinct surface structures.

Keywords

Ambient environmentscrater depthfluencemicro hardnessmicro structuringsputtering yield measurementssurface morphologyZirconium
Type
Research Article
Information
Laser and Particle Beams , Volume 37 , Issue 1 , March 2019 , pp. 128 - 140
Copyright
Copyright © Cambridge University Press 2019 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Albu, C, Dinescu, A, Filipescu, M, Ulmeanu, M and Zamfirescu, M (2013) Periodical structures induced by femtosecond laser on metals in air and liquid environments. Applied Surface Science 278, 347–351.Google Scholar
Ali, N, Bashir, S, Rafique, MS, Begum, N and Husinsky, W (2017 a). Nanostructuring of zirconium by femtosecond laser irradiation in the ambient environment of air and ethanol. Optik-International Journal for Light and Electron Optics 134, 149–160.Google Scholar
Ali, N, Bashir, S, Rafique, MS, Begum, N, Husinsky, W, Ajami, A and Natahala, CS (2017 b) Femtosecond laser induced nanostructuring of zirconium in liquid confined environment. Chinese Physics B26, 015204.10.1088/1674-1056/26/1/015204Google Scholar
Andersen, HH and Bay, HL (1981) Sputtering yield measurements. In Sputtering by Particle Bombardment. Springer, pp. 145–218.10.1007/3540105212_9Google Scholar
Ang, L, Lau, Y, Gilgenbach, R, Spindler, H, Lash, J and Kovaleski, S (1998) Surface instability of multipulse laser ablation on a metallic target. Journal of Applied Physics 83, 4466–4471.Google Scholar
Barmina, EV, Barberoglu, M, Zorba, V, Simakin, AV, Stratakis, E, Fotakis, K and Shafeev, GA (2009) Surface nanotexturing of tantalum by laser ablation in water. Quantum Electronics 39, 89.10.1070/QE2009v039n01ABEH013877Google Scholar
Bashir, S, Vaheed, H and Mahmood, K (2013) Nanosecond pulsed laser ablation of brass in a dry and liquid-confined environment. Applied Physics A 110, 389–395.Google Scholar
Bashir, S, Khurshid, S, Akram, M, Ali, N, Ahmad, S and Yousaf, D (2015 a) Pulsed laser ablation of Ni in vacuum and N2 atmosphere at various fluences. Quantum Electronics 45, 640.Google Scholar
Bashir, S, Rafique, MS, Nathala, CS, Ajami, A and Husinsky, W (2015 b) SEM and Raman spectroscopy analyses of laser-induced periodic surface structures grown by ethanol-assisted femtosecond laser ablation of chromium. Radiation Effects and Defects in Solids 170, 414–428.Google Scholar
Bogaerts, A, Chen, Z and Bleiner, D (2006) Laser ablation of copper in different background gases: Comparative study by numerical modeling and experiments. Journal of Analytical Atomic Spectrometry 21, 384–395.Google Scholar
Brosda, B, Castell-Munoz, R and Kunze, H-J (1990) Laser ablation of zirconium in gas atmospheres at low pressures. Journal of Physics D: Applied Physics 23, 735.Google Scholar
Cabalin, L and Laserna, J (1998) Experimental determination of laser induced breakdown thresholds of metals under nanosecond Q-switched laser operation. Spectrochimica Acta Part B: Atomic Spectroscopy 53, 723–730.Google Scholar
Cazzaniga, A, Ettlinger, RB, Canulescu, S, Schou, J and Pryds, N (2014) Nanosecond laser ablation and deposition of silver, copper, zinc and tin. Applied Physics A 117, 89–92.Google Scholar
Chan, W-T and Hamilton, I (1998) Valence shell structures in the distributions of the Laplacian of the electron density and the one-electron potential for diatomic molecules. The Journal of chemical physics 108, 2473–2485.Google Scholar
Chichkov, BN, Momma, C, Nolte, S, Von Alvensleben, F and Tünnermann, A (1996) Femtosecond, picosecond and nanosecond laser ablation of solids. Applied Physics A 63, 109–115.Google Scholar
Cristoforetti, G, Lorenzetti, G, Benedetti, P, Tognoni, E, Legnaioli, S and Palleschi, V (2009) Effect of laser parameters on plasma shielding in single and double pulse configurations during the ablation of an aluminium target. Journal of Physics D: Applied Physics 42, 225207.Google Scholar
Cristoforetti, G, De Giacomo, A, Dell'Aglio, M, Legnaioli, S, Tognoni, E, Palleschi, V and Omenetto, N (2010) Local thermodynamic equilibrium in laser-induced breakdown spectroscopy: Beyond the McWhirter criterion. Spectrochimica Acta Part B: Atomic Spectroscopy 65, 86–95.Google Scholar
Cristoforetti, G, Tognoni, E and Gizzi, L (2013) Thermodynamic equilibrium states in laser-induced plasmas: From the general case to laser-induced breakdown spectroscopy plasmas. Spectrochimica Acta Part B: Atomic Spectroscopy 90, 1–22.10.1016/j.sab.2013.09.004Google Scholar
Das, SK, Khan, MMR, Parandhaman, T, Laffir, F, Guha, AK, Sekaran, G and Mandal, AB (2013) Nano-silica fabricated with silver nanoparticles: Antifouling adsorbent for efficient dye removal, effective water disinfection and biofouling control. Nanoscale 5, 5549–5560.Google Scholar
Dawood, A, Bashir, S, Akram, M, Hayat, A, Ahmed, S, Iqbal, MH and Kazmi, AH (2015) Effect of nature and pressure of ambient environments on the surface morphology, plasma parameters, hardness, and corrosion resistance of laser-irradiated Mg-alloy. Laser and Particle Beams 33, 315–330.Google Scholar
Duley, W (2006) Polycyclic aromatic hydrocarbons, carbon nanoparticles and the diffuse interstellar bands. Faraday Discussions 133, 415–425.Google Scholar
Garrelie, F, Colombier, J-P, Pigeon, F, Tonchev, S, Faure, N, Bounhalli, M, Reynaud, S and Parriaux, O (2011) Evidence of surface plasmon resonance in ultrafast laser-induced ripples. Optics Express 19, 9035–9043.10.1364/OE.19.009035Google Scholar
George, S, Kumar, A, Singh, R and Nampoori, V (2010) Effect of ambient gas on the expansion dynamics of plasma plume formed by laser blow off of thin film. Applied Physics A 98, 901–908.Google Scholar
Hansen, T, Schou, J and Lunney, J (1997) Angular distributions of silver ions and neutrals emitted in vacuum by laser ablation. Euro Physics Letters 40, 441.Google Scholar
Harilal, S, Bindhu, C, Nampoori, V and Vallabhan, C (1998) Influence of ambient gas on the temperature and density of laser produced carbon plasma. Applied Physics Letters 72, 167–169.Google Scholar
Hayat, A, Bashir, S, Strickland, D, Rafique, MS, Wales, B, Tuairqi, S and Sanderson, J (2019) The role of laser fluence and ambient environments on femtosecond laser induced breakdown spectroscopy of Mg and Zr. Journal Of Applied Physics 125, 083302.10.1063/1.5063897Google Scholar
Hull, D and Bacon, DJ (2011) Introduction to dislocations. MA, USA: Elsevier.Google Scholar
Iida, Y (1990) Effects of atmosphere on laser vaporization and excitation processes of solid samples. Spectrochimica Acta Part B: Atomic Spectroscopy 45, 1353–1367.Google Scholar
Iqbal, MH, Bashir, S, Rafique, MS, Dawood, A, Akram, M, Mahmood, K, Hayat, A, Ahmad, R, Hussain, T and Mahmood, A (2015) Pulsed laser ablation of Germanium under vacuum and hydrogen environments at various fluences. Applied Surface Science 344, 146–158.Google Scholar
Kalsoom, U-I, Bashir, S and Ali, N (2013) SEM, AFM, EDX and XRD analysis of laser ablated Ti in nonreactive and reactive ambient environments. Surface and Coatings Technology 235, 297–302.Google Scholar
Kelly, R, Cuomo, J, Leary, P, Rothenberg, JE, Braren, B and Aliotta, C (1985) Laser sputtering: Part I. On the existence of rapid laser sputtering at 193 nm. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 9, 329–340.Google Scholar
Khan, S, Bashir, S, Hayat, A, Khaleeq-ur-Rahman, M and Haq, FU (2013) Laser-induced breakdown spectroscopy of tantalum plasma. Physics of Plasmas 20, 073104.Google Scholar
Ko, SH, Pan, H, Hwang, DJ, Chung, J, Ryu, S, Grigoropoulos, CP and Poulikakos, D (2007) High resolution selective multilayer laser processing by nanosecond laser ablation of metal nanoparticle films. Journal of Applied Physics 102, 093102.Google Scholar
Kools, J, Van De Riet, E and Dieleman, J (1993) A simple formalism for the prediction of angular distributions in laser ablation deposition. Applied Surface Science 69, 133–139.Google Scholar
Körner, C, Mayerhofer, R, Hartmann, M and Bergmann, H (1996) Physical and material aspects in using visible laser pulses of nanosecond duration for ablation. Applied Physics A 63, 123–131.Google Scholar
Krstulović, N, Labazan, I, Milošević, S, Cvelbar, U, Vesel, A and Mozetič, M (2006) Optical emission spectroscopy characterization of oxygen plasma during treatment of a PET foil. Journal of Physics D: Applied Physics 39, 3799.Google Scholar
Kumari, S and Khare, A (2014) Langmuir probe studies of laser ablated ruby plasma and correlation with pulsed laser deposited ruby thin film properties. Laser and Particle Beams 32, 359–367.Google Scholar
Lappalainen, J, Frantti, J and Lantto, V (1998) Particulate formation in PZT thin films during pulsed laser ablation deposition. Journal of the Korean Physical Society 32, S1183–S1186.Google Scholar
Lasemi, N, Pacher, U, Zhigilei, L, Bomatí-Miguel, O, Lahoz, R and Kautek, W (2018) Pulsed laser ablation and incubation of nickel, iron and tungsten in liquids and air. Applied Surface Science 433, 772–779.Google Scholar
Lippert, T, Stebani, J, Ihlemann, J, Nuyken, O and Wokaun, A (1993) Excimer laser ablation of novel triazene polymers: Influence of structural parameters on the ablation characteristics. The Journal of Physical Chemistry 97, 12296–12301.Google Scholar
Liu, X, Du, D and Mourou, G (1997) Laser ablation and micromachining with ultrashort laser pulses. IEEE Journal of Quantum Electronics 33, 1706–1716.Google Scholar
Liu, Y, Jiang, M, Yang, G, Guan, Y and Dai, L (2011) Surface rippling on bulk metallic glass under nanosecond pulse laser ablation. Applied Physics Letters 99, 191902.Google Scholar
Mansour, N, Jamshidi-Ghaleh, K and Ashkenasi, D (2006) Formation of conical microstructures of silicon with picosecond laser pulses in air. Journal of Laser Micro/Nanoengineering 1, 10.2961.Google Scholar
Mihailescu, IN and Caricato, AP (2018) Nanosecond laser ablation and processing of solid targets in vacuum or in a low-gas atmosphere. In Pulsed Laser Ablation. Singapore: Pan Stanford, pp. 101–146.Google Scholar
Nolte, S, Momma, C, Jacobs, H, Tünnermann, A, Chichkov, BN, Wellegehausen, B and Welling, H (1997) Ablation of metals by ultrashort laser pulses. Journal of Optical Society of America B 14, 2716–2722.Google Scholar
Pérez, J and Weiner, BR (1992) The laser ablation of gold films at the electrode surface of a quartz crystal microbalance. Applied Surface Science 62, 281–285.10.1016/0169-4332(92)90370-DGoogle Scholar
Raheem, G and Abdurrahman, K (2013) Structural Characterization of Nanoparticles Prepared by laser Ablation of Gold target in water. Journal of University of Babylon 21, 2477–2480.Google Scholar
Saghebfar, M, Tehrani, M, Darbani, S and Majd, A (2017) Femtosecond pulse laser ablation of chromium: Experimental results and two-temperature model simulations. Applied Physics A 123, 28.Google Scholar
Sahasrabudhe, H and Bandyopadhyay, A (2018) Laser-Based Additive Manufacturing of Zirconium. Applied Sciences 8, 393.Google Scholar
Sanchez, F, Morenza, J, Aguiar, R, Delgado, J and Varela, M (1996) Whisker like structure growth on silicon exposed to ArF excimer laser irradiation. Applied Physics Letters 69, 620–622.Google Scholar
Sauerbrey, G (1959) Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung. Zeitschrift fuer Physik A: Hadrons and Nuclei 155, 206–222.Google Scholar
Shen, M, Crouch, C, Carey, J, Younkin, R, Mazur, E, Sheehy, M and Friend, C (2003) Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask. Applied Physics Letters 82, 1715–1717.Google Scholar
Sipe, J, Young, JF, Preston, J and Van Driel, H (1983) Laser-induced periodic surface structure. I. Theory. Physical Review B 27, 1141.Google Scholar
Svendsen, W, Ellegaard, O and Schou, J (1996) Laser ablation deposition measurements from silver and nickel. Applied Physics A 63, 247–255.Google Scholar
Tehniat, S, Bashir, S, Mahmood, K and Sharif, A (2018) Surface morphology correlated with sputtering yield measurements of laser-ablated iron. Laser and Particle Beams 36, 427–441.10.1017/S0263034618000435Google Scholar
Ursu, I, Mihailescu, I, Nistor, L, Popa, A, Popescu, M, Teodorescu, V, Nanu, L, Prokhorov, A, Konov, V and Tokarev, V (1985) Titanium and zirconium nitridation under the action of microsecond pulsed TEA CO2 laser radiation in technical nitrogen. Journal of Physics D: Applied Physics 18, 1693.Google Scholar
Vikram, V, Wadadekar, Y, Kembhavi, AK and Vijayagovindan, G (2010) Pymorph: Automated galaxy structural parameter estimation using python. Monthly Notices of the Royal Astronomical Society 409, 1379–1392.10.1111/j.1365-2966.2010.17426.xGoogle Scholar
Von Gutfeld, R and Dreyfus, R (1989) Electronic probe measurements of pulsed copper ablation at 248 nm. Applied Physics Letters 54, 1212–1214.Google Scholar
Wajid, A (1997) On the accuracy of the quartz-crystal microbalance (QCM) in thin-film depositions. Sensors and Actuators a: Physical 63, 41–46.Google Scholar
Warcholinski, B and Gilewicz, A (2009) Tribological properties of CrNx coatings. Journal of Achievements in Materials and Manufacturing Engineering 37, 498–504.Google Scholar
Wu, H, Wu, C, Zhang, N, Zhu, X, Ma, X and Zhigilei, LV (2018) Experimental and computational study of the effect of 1 atm background gas on nanoparticle generation in femtosecond laser ablation of metals. Applied Surface Science 435, 1114–1119.Google Scholar
Yar, A, Ali, R and Baig, MA (2013) Measurement of the photoionization cross section for the 6 p2 P3/2 state of potassium using a time-of-flight mass spectrometer. Physical Review A 87, 045401.Google Scholar
Zehra, K, Bashir, S, Hassan, S, Ahmed, QS, Akram, M and Hayat, A (2017) The effect of nature and pressure of ambient environment on laser-induced breakdown spectroscopy and ablation mechanisms of Si. Laser and Particle Beams 35, 492–504.Google Scholar
Zehra, K, Bashir, S, Hassan, SA, Hayat, A and Akram, M (2018) Spectroscopic and morphological investigation of laser ablated silicon at various laser fluences. Optik 164, 186–200.Google Scholar
Zhang, C and Lin, J (2011) Visible-light induced oxo-bridged Zr IV − O − Ce III redox centre in tetragonal ZrO 2–CeO 2 solid solution for degradation of organic pollutants. Physical Chemistry Chemical Physics 13, 3896–3905.Google Scholar
Zhang, X, Chu, S, Ho, J and Grigoropoulos, C (1997) Excimer laser ablation of thin gold films on a quartz crystal microbalance at various argon background pressures. Applied Physics A: Materials Science & Processing 64, 545–552.Google Scholar