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Synthesis and properties of BxCyNz coatings

Published online by Cambridge University Press:  26 November 2012

M. N. Oliveira  and
O. Conde
M. N. Oliveira
Affiliation:
Department of Physics, Faculty of Sciences, University of Lisbon, Campo Grande Ed. C8, 1749–016 Lisboa, Portugal
O. Conde
Affiliation:
Department of Physics, Faculty of Sciences, University of Lisbon, Campo Grande Ed. C8, 1749–016 Lisboa, Portugal
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Abstract

Some of the most interesting compounds from both technological and a scientific viewpoint can be found within the B–C–N composition triangle. Despite all the attention that some phases on the vertices and sides of the triangle have attracted, few works have focused inside the triangle itself. A laser-assisted chemical vapor deposition system was used to deposit B–C–N phases over fused quartz substrates. Two sets of gaseous precursors were used, namely B2H6 + NH3 + C2H4 and B2H6 + (CH3)2NH. The coatings were characterized regarding chemical composition, structure, and morphology. Hardness measurements were also carried out with a depth-sensing indentation instrument. It was found that depending on the gas phase, different regions of the BCN solid composition triangle are accessed. Coatings ranging from pure h-BN to pure B4C were obtained, as well as mixtures of these with BxCyNz compounds.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 3 , March 2001 , pp. 734 - 743
Copyright
Copyright © Materials Research Society 2001

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