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Piezoresistivity in ruthenium-based metal–insulator– metal structures

Published online by Cambridge University Press:  31 January 2011

Ahmed Amin
Ahmed Amin
Affiliation:
Naval Sea Systems Command, Newport, Rhode Island 02841–1708
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Abstract

The resistance change with applied stress was measured for ruthenium-based metal–insulator–metal thick films under tensile and hydrostatic pressures over the temperature range −25 to +135 °C. The derived longitudinal, transverse, and hydrostatic piezoresistivity coefficients were corrected for elastic effects to yield the corresponding piezoresistivity coefficients and their temperature dependencies. The results clearly demonstrate for the first time a hydrostatic piezoresistivity coefficient that is sevenfold larger than the longitudinal component. Symmetry analysis is used to explain this phenomenon and to deduce additional piezoresistivity matrix elements and their degeneracy. In addition, pressure effects on electrical transport support a tunneling mechanism.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 8 , August 2001 , pp. 2239 - 2243
Copyright
Copyright © Materials Research Society 2001

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