Hostname: page-component-f554764f5-rj9fg Total loading time: 0 Render date: 2025-04-08T17:48:42.211Z Has data issue: false hasContentIssue false
  • English
  • Français

Mechanical deformation in silicon by micro-indentation

Published online by Cambridge University Press:  31 January 2011

J. E. Bradby ,
J. S. Williams ,
J. Wong-Leung ,
M. V. Swain  and
P. Munroe
J. E. Bradby*
Affiliation:
Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, The Australian National University, Canberra, ACT 0200, Australia
J. S. Williams
Affiliation:
Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, The Australian National University, Canberra, ACT 0200, Australia
J. Wong-Leung
Affiliation:
Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, The Australian National University, Canberra, ACT 0200, Australia
M. V. Swain
Affiliation:
Biomaterials Science Research Unit, Department of Mechanical and Mechatronic Engineering and Faculty of Dentistry, The University of Sydney, Eveleigh, NSW 1430, Australia
P. Munroe
Affiliation:
Electron Microscope Unit, University of New South Wales, Sydney, NSW 2052, Australia
*
a)e-mial: [email protected]
Get access

Abstract

The mechanical deformation of crystalline silicon induced by micro-indentation has been studied. Indentations were made using a variety of loading conditions. The effects on the final deformation microstructure of the load–unload rates and both spherical and pointed (Berkovich) indenters were investigated at maximum loads of up to 250 mN. The mechanically deformed regions were then examined using cross-sectional transmission electron microscopy (XTEM), Raman spectroscopy, and atomic force microscopy. High-pressure phases (Si-XII and Si-III) and amorphous silicon have been identified in the deformation microstructure of both pointed and spherical indentations. Amorphous Si was observed using XTEM in indentations made by the partial load–unload method, which involves a fast pressure release on final unloading. Loading to the same maximum load using the continuous load cycle, with an approximately four times slower final unloading rate, produced a mixture of Si-XII and Si-III. Slip was observed for all loading conditions, regardless of whether the maximum load exceeded that required to induce “pop-in” and occurs on the {111} planes. Phase transformed material was found in the region directly under the indenter which corresponds to the region of greatest hydrostatic pressure for spherical indentation. Slip is thought to be nucleated from the region of high shear stress under the indenter.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 5 , May 2001 , pp. 1500 - 1507
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1.Clarke, D.R., Kroll, M.C., Kirchner, P.D., Cook, R.F., and Hockey, B.J., Phys. Rev. Lett. 21, 2156 (1988).CrossRefGoogle Scholar
2.Weppelmann, E.R., Field, J.S., and Swain, M.V., J. Mater. Res. 8, 830 (1993).CrossRefGoogle Scholar
3.Page, T., Oliver, W.C., and McHargue, C.J., J. Mater. Res. 7, 450 (1992).CrossRefGoogle Scholar
4.Williams, J.S., Chen, Y., Wong-Leung, J., Kerr, A., and Swain, M.V., J. Mater. Res. 14, 2338 (1999).CrossRefGoogle Scholar
5.Mann, A.B., van Heerden, D., Pethica, J.B., and Weihs, T.P., J. Mater. Res. 15, 1754 (2000).CrossRefGoogle Scholar
6.Hu, J.Z., Merkle, L.D., Menoni, C.S., and Spain, I.L., Phys. Rev. B 34, 4679 (1986).CrossRefGoogle Scholar
7.Gilman, J.J., Philos. Mag B. 67, 207 (1993).CrossRefGoogle Scholar
8.Tabor, D., The Hardness of Metals (Oxford Press, Oxford, U.K., 1951).Google Scholar
9.Piltz, R.O., Maclean, J.R., Clarke, S.J., Ackland, G.J., Hatton, P.D., and Crain, J., Phys. Rev. B 52, 4072 (1995).CrossRefGoogle Scholar
10.Kailer, A., Gogotsi, Y.G., and Nickel, K.G., J. Appl. Phys. 81, 3057 (1997).CrossRefGoogle Scholar
11.Weppelmann, E.R., Field, J.S., and Swain, M.V., J. Mater. Sci. 30, 2455 (1995).CrossRefGoogle Scholar
12.Williams, J.S., Field, J.S., and Swain, M.V., in Thin Films: Stresses and Mechanical Properties IV, edited by Townsend, P.H., Weihs, T.P., Sanders, J.E. Jr, and Borgesen, P. (Mater. Res. Soc. Symp. Proc. 308, Pittsburgh, PA, 1993), p. 571.Google Scholar
13.Pharr, G.M., Oliver, W.C., and Clarke, D.R., J. Electron. Mater. 19, 881 (1990).CrossRefGoogle Scholar
14.Bradby, J.E., Williams, J.S., Wong-Leung, J., Swain, M.V., and Munroe, P., Appl. Phys. Lett. 77, 3749 (2000).CrossRefGoogle Scholar
15.Gridneva, I.V., Milman, Yu.V., and Trefilov, V.I., Phys. Status Solidi (A) 14, 177 (1972).CrossRefGoogle Scholar
16.Pharr, G.M., Oliver, W.C., and Harding, D.S., J. Mater. Res. 6, 1129 (1991).CrossRefGoogle Scholar
17.Callahan, D.L. and Morris, J.C., J. Mater. Res. 7, 1614 (1992).CrossRefGoogle Scholar
18.Wu, Y.Q. and Xu, Y.B., J. Mater. Res. 14, 682 (1999).CrossRefGoogle Scholar
19.Shimatani, A., Nango, T., Suprijadi, , and Saka, H., in Fundamentals of Nanoindentation and Nanotribology, edited by Moody, N.R., Gerberich, W.W., Bevenham, N., and Baker, S.P. (Mater. Res. Soc. Symp. Proc. 522, Warrendale, PA, 1998), p. 71.Google Scholar
20.Saka, H., J. Vac. Sci. Technol. B 16, 2522 (1998).CrossRefGoogle Scholar
21.Kailer, A., Nickel, K.G., and Gogotsi, Y.G., J. Raman. Spectrosc. 30, 939 (1999).3.0.CO;2-C>CrossRefGoogle Scholar
22.Lucazeau, G. and Abello, L., Analusis 23, 301 (1995).Google Scholar
23.Gogotsi, Y.G., Domnich, V., Dub, S.N., Kailer, A., and Nickel, K.G., J. Mater Res. 15, 871 (2000).CrossRefGoogle Scholar
24.Domnich, V., Gogotsi, Y., and Dub, S., Appl. Phys. Lett. 76, 2214 (2000).CrossRefGoogle Scholar
25.Field, J.S. and Swain, M.V., J. Mater. Res. 8, 297 (1993).CrossRefGoogle Scholar
26.Chudoba, T. and Schwarzer, N., SCISOFT Elastica Version 1.01, TU Chemnitz (1999).Google Scholar
27.Lawn, B., Fracture of Brittle Solids (Cambridge University Press, Cambridge, U.K., 1993).CrossRefGoogle Scholar