Hostname: page-component-78c5997874-lj6df Total loading time: 0 Render date: 2024-11-19T12:28:25.509Z Has data issue: false hasContentIssue false
  • English
  • Français

Measuring the critical thickness of thin metalorganic precursor films

Published online by Cambridge University Press:  31 January 2011

Ryan K. Roeder  and
Elliott B. Slamovich
Ryan K. Roeder
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907-1289
Elliott B. Slamovich
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, Indiana 47907-1289
Get access

Abstract

Successful application of sol-gel, metalorganic decomposition, or hydrothermal routes to ceramic thin films depends on the mechanical integrity of the precursor film. Above a critical thickness, a precursor film will crack or decohere from the substrate during drying. The cracking and thickness of thin metalorganic precursor films were simultaneously observed during drying using a standard optical microscope. Isochromatic color fringes produced by interference of reflected white light were used to monitor film thickness. The critical film thickness was determined by the color fringe corresponding to the thickness at which propagating cracks terminated. As a demonstration of the technique, the critical thickness of titanium di(isopropoxide) bis(ethyl acetoacetate) films was measured, showing increased critical thickness with the addition of small amounts of an elastomeric polymer.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 6 , June 1999 , pp. 2364 - 2368
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Croll, S.G., J. Appl. Polym. Sci. 23, 847–858 (1979).CrossRefGoogle Scholar
2.Brinker, C.J., Hurd, A.J., Schunk, P. R., Frye, G. C., and Ashley, C. S., J. Non-Cryst. Solids 147–148, 424–436 (1992).CrossRefGoogle Scholar
3.Atkinson, A. and Guppy, R.M., J. Mater. Sci. 26, 3869–3873 (1991).CrossRefGoogle Scholar
4.Chen, S-Y. and Chen, I-W., J. Am. Ceram. Soc. 78 (11), 2929–2939 (1995).CrossRefGoogle Scholar
5.Bec, S., Tonck, A., and Loubet, J-L., in Thin Films: Stresses and Mechanical Properties IV, edited by Townsend, P. H., Weihs, T. P., Sanchez, J. E. Jr, and Børgesen, P. (Mater. Res. Soc. Symp. Proc. 308, Pittsburgh, PA, 1993), pp. 577–582.Google Scholar
6.Sato, K., Progr. Org. Coat. 8, 143–160 (1990).CrossRefGoogle Scholar
7.Bierwagon, G.P., J. Coat. Technol. 51 (658), 117–126 (1979).Google Scholar
8.Evans, A.G., Drory, M. D., and Hu, M. S., J. Mater. Res. 3, 1043–1048 (1988).CrossRefGoogle Scholar
9.Hu, M.S. and Evans, A. G., Acta Metall. 37 (3), 917–925 (1989).CrossRefGoogle Scholar
10.Thouless, M.D., Thin Solid Films 181, 397–406 (1989).CrossRefGoogle Scholar
11.Croll, S.G., J. Coat. Technol. 52 (665), 35–43 (1980).Google Scholar
12.Heavens, O.S., Optical Properties of Thin Solid Films (Butterworths Scientific Publications, London, 1955).Google Scholar
13. W. van Vonno, Measurement of the Thickness and Refractive Index of Evaporated Dielectric Films (Uitgeverij Waltman, Delft, 1968).Google Scholar
14.Adams, A.C., Schinke, D. P., and Capio, C. D., J. Electrochem. Soc. 126 (9), 1539–1543 (1979).CrossRefGoogle Scholar
15.Ulrich, R. and Torge, R., Appl. Opt. 12 (12), 2901–2908 (1973).CrossRefGoogle Scholar
16.Slamovich, E.B. and Aksay, I. A., J. Am. Ceram. Soc. 79 (1), 239–247 (1996).CrossRefGoogle Scholar
17.Slamovich, E.B. and Aksay, I. A., in Better Ceramics Through Chemistry VI, edited by Cheetham, A. K., Brinker, C.J., Mecartney, M. L., and Sanchez, C. (Mater. Res. Soc. Symp. Proc. 346, Pittsburgh, PA, 1994), pp. 63–68.Google Scholar
18.Yamamoto, A. and Kambara, S., J. Am. Chem. Soc. 79, 4344–4348 (1957).CrossRefGoogle Scholar
19.Greivenkamp, J. E., in Handbook of Optics, 2nd ed., edited by Bass, M. (McGraw-Hill, New York, 1995), Vol. 1, pp. 2.3–2.25.Google Scholar
20.Born, M. and Wolf, E., Principles of Optics, 4th ed. (Pergamon Press, Oxford, 1970).Google Scholar
21.Nassau, K., The Physics and Chemistry of Color (John Wiley and Sons, New York, 1983).Google Scholar
22. Personal communication, Gelest Inc., Tullytown, PA.Google Scholar
23.Heywood, R.B., Photoelasticity for Engineers (Pergamon Press, Oxford, 1969).Google Scholar
24.Mönch, G.C., Optik 9, 75–83 (1952).Google Scholar
25.Extrand, C., Polym. Eng. Sci. 34 (5), 390–394 (1994).CrossRefGoogle Scholar
26.Levinson, W.A., Arnold, A., and DeHodgins, O., Polym. Eng. Sci. 33 (15), 980–988 (1993).CrossRefGoogle Scholar
27.Weill, A. and Dechenaux, E., Polym. Eng. Sci. 28 (15), 945–948 (1988).CrossRefGoogle Scholar
28.Bornside, D.E., Macosko, C. W., and Scriven, L.E., J. Electrochem. Soc. 138 (1), 317–320 (1991).CrossRefGoogle Scholar
29.Meyerhofer, D., J. Appl. Phys. 49 (7), 3993–3997 (1978).CrossRefGoogle Scholar
30.Emslie, A.G., Bonner, F.T., and Peck, L. G., J. Appl. Phys. 29 (5), 858–862 (1958).CrossRefGoogle Scholar
31.Polymer Handbook, edited by Brandrup, J. and Immergut, E. H. (John Wiley and Sons, New York, 1989).Google Scholar
32.Pliskin, W.A. and Esch, R.P., J. Appl. Phys. 39 (7), 3274–3276 (1968).CrossRefGoogle Scholar
33.Corl, E.A. and Wimpfheimer, H., Solid-State Electron. 7, 755–761 (1964).CrossRefGoogle Scholar
34.Reizman, F., J. Appl. Phys. 36 (12), 3804–3807 (1965).CrossRefGoogle Scholar
35.Reizman, F. and van Gelder, W., Solid-State Electron. 10, 625–632 (1967).CrossRefGoogle Scholar
36.Voncken, J. H. L., Lijzenga, C., Kumar, K.P., Keizer, K., Burggraaf, A. J., and Bonekamp, B. C., J. Mater. Sci. 27, 472–478 (1992).CrossRefGoogle Scholar
37.Lampenscherf, S. and Pompe, W., Z. Metallkd. 89 (2), 96–105 (1998).Google Scholar
38.Boggs, K.E., Wilcos, D. L., Payne, D. A., and Allen, L. S., Proc. SPIE Int. Soc. Opt. Eng. 2256, 350–355 (1994).Google Scholar
39.Chiu, R.C. and Cima, M. J., Ceram. Trans. 22, 347–356 (1991).Google Scholar
40.Garino, T.J. and Harrington, M., in Ferroelectric Thin Films II, edited by Kingon, A. I., Myers, E. R., and Tuttle, B. (Mater. Res. Soc. Symp. Proc. 243, Pittsburgh, PA, 1992), pp. 341–347.Google Scholar
41.Roeder, R.K. and Slamovich, E. B., Ceram. Trans. 83, 375–382 (1998).Google Scholar