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Development of a continuous microscratch technique in an atomic force microscope and its application to study scratch resistance of ultrathin hard amorphous carbon coatings

Published online by Cambridge University Press:  31 January 2011

Sriram Sundararajan  and
Bharat Bhushan
Sriram Sundararajan
Affiliation:
Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio 43210
Bharat Bhushan
Affiliation:
Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio 43210
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Abstract

A method to measure friction during scratching at linearly increasing loads in a commercial atomic force/friction force microscope (AFM/FFM) has been developed. The normal load was increased in small increments over the required range for the scratch using a software module while the friction signal was measured via a breakout box and data acquisition computer. Topography images of the scratch were obtained in situ with the AFM in tapping mode with minimal loss of damage event information. This technique was employed to study the scratch resistance of hard amorphous carbon coatings of thicknesses ranging from 20 nm down to 3.5 nm deposited by different commercially available deposition techniques on a silicon substrate.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 2 , February 2001 , pp. 437 - 445
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

1.Bhushan, B., Handbook of Micro/nanotribology, 2nd ed. (CRC, Boca Raton, FL, 1999).Google Scholar
2.Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings, STP640, edited by Mittal, K.L. (ASTM, Philadelphia, PA, 1978).CrossRefGoogle Scholar
3.Bhushan, B., Principles and Applications of Tribology (Wiley, NY, 1999).Google Scholar
4.Bhushan, B. and Gupta, B.K., Handbook of Tribology, Materials, Coatings and Surface Treatments (Krieger Publishing, Malabar, FL, 1997).Google Scholar
5.Perry, A.J., Thin Solid Films 78, 77–93 (1981).Google Scholar
6.Valli, J., J. Vac. Sci. Technol. A 4, 3007–3014 (1986).CrossRefGoogle Scholar
7.Steinmann, P.A., Tardy, Y., and Hintermann, H.E., Thin Solid Films 154, 333–349 (1987).CrossRefGoogle Scholar
8.Wu, T.W., in Thin Films: Stresses and Mechanical Properties II, edited by Doerner, M.F., Oliver, W.C., Pharr, G.M., and Brotzen, F.R. (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), pp. 191–205.Google Scholar
9.Wu, T.W., J. Mater. Res. 6, 407–426 (1991).CrossRefGoogle Scholar
10.Jacobson, S., Jonsson, B., and Sundquist, B., Thin Solid Films 107, 89–98 (1983).CrossRefGoogle Scholar
11.Bhushan, B., Gupta, B.K. and Azarian, M.H., Wear 181–183, 743–758 (1995).CrossRefGoogle Scholar
12.Bhushan, B. and Koinkar, V.N., J. Appl. Phys. 75, 5741–5746 (1994).CrossRefGoogle Scholar
13.Nanoscope Command Reference Manual, Ver 4.22ce (Digital Instruments, 1996).Google Scholar
14.Ruan, J. and Bhushan, B., ASME J. Tribol. 116, 378–388 (1994).CrossRefGoogle Scholar
15.Hector, L.G. and Schmid, S.R., Wear 215, 247–256 (1998).Google Scholar
16.Bhushan, B. and Ruan, J., ASME J. Tribol. 116, 389–396 (1994).CrossRefGoogle Scholar
17.Lettington, A.H., Carbon 36, 555–560 (1998).CrossRefGoogle Scholar
18.Bhushan, B., Diamond Relat. Mater. 8, 1985–2015 (1999).CrossRefGoogle Scholar
19.Gupta, B.K. and Bhushan, B., Thin Solid Films 270, 391–398 (1995).CrossRefGoogle Scholar
20.Gupta, B.K. and Bhushan, B., Wear 190, 110 –122 (1995).Google Scholar
21.Bull, S.J., Diamond Relat. J. Mater. 4, 827–836 (1995).CrossRefGoogle Scholar
22.Bhushan, B. and Li, X., Mater. Res. 12, 54–63 (1997).CrossRefGoogle Scholar
23.Zhao, X. and Bhushan, B., Wear 223, 66–78 (1998).CrossRefGoogle Scholar
24.Li, X. and Bhushan, B., J. Mater. Res. 14, 2328–2337 (1999).CrossRefGoogle Scholar
25.O’Sullivan, T.C. and King, R.B., ASME J. Tribol. 110, 235–240 (1988).CrossRefGoogle Scholar