Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-30T05:59:59.904Z Has data issue: false hasContentIssue false
  • English
  • Français

Deposition of molybdenum carbonitride thin films from Mo(NBut)2(NHBut)2

Published online by Cambridge University Press:  03 March 2011

Hsin-Tien Chiu ,
Wen-Yu Ho  and
Shiow-Huey Chuang
Hsin-Tien Chiu
Affiliation:
Department of Applied Chemistry, National Chiao Tung University, Hsinchu, Taiwan 30050, Republic of China
Wen-Yu Ho
Affiliation:
Department of Applied Chemistry, National Chiao Tung University, Hsinchu, Taiwan 30050, Republic of China
Shiow-Huey Chuang
Affiliation:
Department of Applied Chemistry, National Chiao Tung University, Hsinchu, Taiwan 30050, Republic of China
Get access

Abstract

Mo(NBut)2(NHBu1)2 is used as a single-source precursor to deposit thin films of cubic phase molybdenum carbonitride, MoCxNy (x: 0.2-0.55, y: 0.1-0.47), by chemical vapor deposition on silicon substrates. In general, the C/Mo ratios increased from 0.2 to 0.55 and the N/Mo ratios decreased from 0.47 to 0.1 with increasing the temperature of deposition from 773 to 923 K. Based on the elemental composition and the composition of the gas phase products, it is proposed that the carbon atoms were incorporated through β-methyl activation of the ligands.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 9 , Issue 7 , July 1994 , pp. 1622 - 1624
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Toth, L. E., Transition Metal Carbides and Nitrides (Academic Press, New York, 1971), and references therein.Google Scholar
2Girolami, G. S., Jensen, J. A., Pollina, D. M., Williams, W. S., Kaloyeros, A., and Alloca, C. M., J. Am. Chem. Soc. 107, 1579 (1987).CrossRefGoogle Scholar
3Winter, C. H., Sheridan, P. H., Lewkebandara, T. S., Heeg, M. J., and Proscia, J. W., J. Am. Chem. Soc. 114, 1095 (1992).CrossRefGoogle Scholar
4Fix, R. M., Gordon, R. G., and Hoffman, D. M., Chem. Mater. 2, 235 (1990).CrossRefGoogle Scholar
5Laurent, F., Michel, P., Feurer, R., Morancho, R., Valade, L., Choukroun, R., and Cassoux, P., J. Mater. Chem. 3, 659 (1993).CrossRefGoogle Scholar
6Chiu, H-T. and Chang, W-P., J. Mater. Sci. Lett. 11, 96 (1992).CrossRefGoogle Scholar
7Maury, F. and Ossola, F., Thin Solid Films 207, 82 (1992).CrossRefGoogle Scholar
8Chiu, H-T. and Chuang, S-H., J. Mater. Res. 8, 1353 (1993).CrossRefGoogle Scholar
9Danopoulos, A. A., Wilkinson, G., Hussain-Bates, B., and Hursthouse, M. B., J. Chem. Soc. Dalton Trans. 2753 (1990). Mo(NtBu)2Cl2 used in the synthesis of Mo(NtBu)2(NHBut)2 was replaced by Mo(NtBu)2Cl2(DME) (DME = 1,2-dimethoxyethane), prepared according to the following literature: Fox, H. H., Yap, K. B., Robbins, J., Cai, S., and Schrock, R. R., Inorg. Chem. 31, 2287 (1992); Dyer, P. W., Gibson, V. C., Howard, J. A. K., Whittle, B., and Wilson, C., J. Chem. Soc, Chem. Commun. 1666 (1992).Google Scholar
10Chiu, H-T. and Huang, S-C., J. Mater. Sci. Lett. 12, 537 (1993).CrossRefGoogle Scholar
11Fix, R., Gordon, R. G., and Hoffman, D. M., Chem. Mater. 3, 1138 (1991).CrossRefGoogle Scholar
12Volpe, L. and Boudart, M., J. Solid State Chem. 59, 348 (1985).CrossRefGoogle Scholar
13Toth, L. E., Transition Metal Carbides and Nitrides (Academic Press, New York, 1971), p. 5.Google Scholar