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Co-implantation of Mo+ and S+ in SiO2

Published online by Cambridge University Press:  31 January 2011

A.K. Rai  and
R.S. Bhattacharya
A.K. Rai
Affiliation:
UES, Inc., 4401 Dayton-Xenia Road, Dayton, Ohio 45432
R.S. Bhattacharya
Affiliation:
UES, Inc., 4401 Dayton-Xenia Road, Dayton, Ohio 45432
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Abstract

An amorphous SiO2 substrate was co-implanted with 175 keV Mo+ and 74 keV S+ ions at doses of 4.97 × 1016 and 1.02 × 1017 cm−2, respectively. Energies of the Mo+ and S+ ions were chosen to obtain nearly overlapping depth profiles. Transmission electron microscopy and Rutherford backscattering techniques were used to characterize the ion-implanted materials. The formation of a MoS2 phase was observed in the as-implanted condition. Annealing of the as-implanted material was performed in an oxygen-free atmosphere as well as in air. The MoS2 phase remained stable at 700 °C for 8 h in an oxygen-free atmosphere whereas it starts oxidizing in air at 600 °C for 2 h. Results are discussed in terms of the available data on the oxidation of MoS2 coatings.

Type
Articles
Information
Journal of Materials Research , Volume 6 , Issue 11 , November 1991 , pp. 2375 - 2380
Copyright
Copyright © Materials Research Society 1991

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References

1.Singer, I. L., in New Materials Approaches to Tribology: Theory and Applications, edited by Pope, L. E., Fehrenbacher, L. L., and Winer, W. O. (Mater. Res. Soc. Symp. Proc. 140, Pittsburgh, PA, 1989), p. 215.Google Scholar
2.Ramalingam, S., in New Materials Approaches to Tribology: Theory and Applications, edited by Pope, L. E., Fehrenbacher, L. L., and Winer, W. O. (Mater. Res. Soc. Symp. Proc. 140, Pittsburgh, PA, 1989), p. 465.Google Scholar
3.Sliney, H. E., Tribo. Inter. 15, 303 (1982).CrossRefGoogle Scholar
4.Hilton, M. R. and Fleischauer, P. D., J. Mater. Res. 5, 406 (1990); P. D. Fleischauer, ASLE Trans. 27, 82 (1984).CrossRefGoogle Scholar
5.Dearnaley, G., Rad. Eff. 63, 1 (1982).CrossRefGoogle Scholar
6.Rai, A. K., Bhattacharya, R. S., Kung, S. C., and Patrizio, D., in Beam-Solid Interactions: Physical Phenomena, edited by Knapp, J. A., Borgesen, P., and Zuhr, R. A. (Mater. Res. Soc. Symp. Proc. 157, Pittsburgh, PA, 1990), p. 549; A. K. Rai, R. S. Bhattacharya, and S. C. Kung, J. Appl. Phys. 68, 5169 (1990).Google Scholar
7.Bhattacharya, R. S., Rai, A. K., and Aronov, V., Tribology Trans. 34, 472 (1991).CrossRefGoogle Scholar
8. Powder Diffraction File (JCPDS International Center for Diffraction Data, Swarthmore, PA, 1983; 6-0097).Google Scholar
9.Martin, J. A., Cross, J. B., and Pope, L. E., in New Materials Approaches to Tribology: Theory and Applications, edited by Pope, L. E., Fehrenbacher, L., and Winer, W. O. (Mater. Res. Soc. Symp. Proc. 140, Pittsburgh, PA, 1989), p. 271.Google Scholar