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Thin-film fracture during nanoindentation of a titanium oxide film–titanium system

Published online by Cambridge University Press:  31 January 2011

M. Pang  and
D. F. Bahr
M. Pang
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164–2920
D. F. Bahr
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164–2920
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Abstract

Nanoindentation testing of the titanium oxide/titanium system with electrochemically grown oxide films exhibits permanent deformation prior to a yield excusion, indicating that the occurrence of this suddent discontinuity is predominantly controlled by oxide film cracking rather than dislocaton nucleation and multiplication. Observations of circumferential cracking also lend support to this explanation. A model has been developed to predict the mechanical response prior to oxide fracture for the case of a hard coating on a soft substrate. During loading contact, the hard coating undergoes elastic deflection which may include both bending and membrane stretching effects, while the substrate is elastoplastically deformed. The model works well for surface films thicker than 20 nm. Additionally, the maximum radial tensile stress in anodically grown titanium oxide, which is responsible for film cracking at the critical load, is approximately 15 GPa.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 9 , September 2001 , pp. 2634 - 2643
Copyright
Copyright © Materials Research Society 2001

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