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Correlation of the Raman spectra with the thermal conductivity of a set of diamond wafers prepared by chemical vapor deposition

Published online by Cambridge University Press:  31 January 2011

Edgar S. Etz ,
Wilbur S. Hurst  and
Albert Feldman
Edgar S. Etz*
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Wilbur S. Hurst
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Albert Feldman
Affiliation:
Materials Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
*
a)Address all correspondence to this author. e-mial: [email protected]
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Abstract

Raman spectroscopy, at laser excitation wavelengths of 514.5, 785, and 1064 nm, is used to study a set of chemical-vapor-deposited (CVD) diamond wafers of known thermal conductivity κ. The in-plane thermal conductivity (at 25 °C) of the diamond wafers ranges from 4 to 22 W cm−1 K−1 and represents a wide range of diamond quality. The spectra were obtained from both macro/micro- sampling measurements, examining the top and bottom wafer surface, as well as wafer cross-sections. Discussed are the peak positions and linewidths of the Raman bands and their relation to sp3-bonded diamond and sp2-bonded carbon in the context of diamond quality and perfection, and the effects of wafer heterogeneities. The detailed analysis of the Raman spectra provides a robust correlation with the room-temperature bulk (or macroscopic) thermal conductivity of these samples. The correlation is made through the determination of the band area ratios of the diamond Raman line at 1333 cm−1 to that of the 1550 cm−1 band characteristic of nondiamond carbon impurities. This dependence is most pronounced for the Fourier-transform Raman data obtained with infrared excitation at 1064 nm, due to resonance enhancement, and therefore allows the detection of carbon impurities, especially for high-quality CVD diamond.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 6 , June 2001 , pp. 1694 - 1711
Copyright
Copyright © Materials Research Society 2001

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