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Anode-supported planar solid oxide fuel cells by plasma-enhanced metalorganic chemical vapor deposition (PE-MOCVD) and electrostatic spray deposition (ESD): Fabrication of dense thin layers of yttria-stabilized zirconia by PE-MOCVD

Published online by Cambridge University Press:  31 January 2011

Gianfranco Di Giuseppe  and
J. Robert Selman
Gianfranco Di Giuseppe
Affiliation:
Center for Electrochemical Science and Engineering, Department of Chemical and Environmental Engineering, Illinois Institute of Technology, 10 West 33rd Street, Chicago, Illinois 60616
J. Robert Selman*
Affiliation:
Center for Electrochemical Science and Engineering, Department of Chemical and Environmental Engineering, Illinois Institute of Technology, 10 West 33rd Street, Chicago, Illinois 60616
*
b)Address all correspondence to this author.
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Abstract

This paper reports a study of plasma-enhanced metalorganic chemical vapor deposition (PE-MOCVD) as a suitable technique for depositing dense, crack-free thin layers of yttria-stabilized zirconia onto porous substrates, as a step in the fabrication of anode-supported planar solid oxide fuel cells (SOFC). Our objective is to present an alternative method by which an SOFC assembly may be fabricated at lower temperature than by conventional methods. PE-MOCVD using zirconium tertbutoxide (ZrTB) -and yttrium hexafluoroacetylacetonate dihydrate (Y6FA) is capable of producing the electrolyte in thin dense layers on smooth surfaces, as demonstrated for Si(110) wafers. If a porous substrate is used, the average surface pore size should not exceed 1–2 μm to obtain a dense film. The crystalline phase of the film was related to the Y6FA concentration in the gas phase using x-ray diffraction. Depth profiling, using x-ray photoelectron spectroscopy, showed that Y is present (fairly uniform) at all depths of the film. Growth rates are dependent on the applied power but independent of substrate temperature. Film density, however, shows a significant dependence on substrate temperature.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 10 , October 2001 , pp. 2983 - 2991
Copyright
Copyright © Materials Research Society 2001

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