Book contents
- Frontmatter
- Contents
- Preface
- 1 Industrial robotics
- 2 Cleanroom robotics
- 3 Design of atmospheric robots
- 4 Design of vacuum robots
- 5 Kinematics
- 6 Dynamics and control
- 7 Test and characterization
- Appendix A SI units and conversion tables
- Appendix B Standards organizations
- Appendix C Standard temperature and pressure (STP)
- References
- Index
4 - Design of vacuum robots
Published online by Cambridge University Press: 06 July 2010
- Frontmatter
- Contents
- Preface
- 1 Industrial robotics
- 2 Cleanroom robotics
- 3 Design of atmospheric robots
- 4 Design of vacuum robots
- 5 Kinematics
- 6 Dynamics and control
- 7 Test and characterization
- Appendix A SI units and conversion tables
- Appendix B Standards organizations
- Appendix C Standard temperature and pressure (STP)
- References
- Index
Summary
- Type
- Chapter
- Information
- Robotics for Electronics ManufacturingPrinciples and Applications in Cleanroom Automation, pp. 73 - 123Publisher: Cambridge University PressPrint publication year: 2010